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US 2008/0290969 A1Published application
Piezoelectric Resonator, Piezoelectric Filter, and Duplexer and Communication Device Using the Same
AssigneePanasonic Corporation
InventorsTakehiko Yamakawa, Hiroshi Nakatsuka, Keiji Onishi
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Abstract
Three or more piezoelectric resonators having resonance frequencies different from one another are realized on the same substrate. First through third frequency adjustment layers 107a through 107c of first through third piezoelectric resonators 102a through 102c provided on the same substrate 101 are formed by varying, among the frequency adjustment layers, the ratio of area (depressions 109 and 110) to be etched to area not to be etched.
Claims11
A piezoelectric resonator comprising:
- a substrate;
- vibration sections provided on the substrate;
- and
- frequency adjustment layers formed on the vibration sections in such a shape that in each of the frequency adjustment layers, adjustment material corresponding to a plurality of small-area figures is removed and a mass per unit of the adjustment material not removed is larger in a peripheral portion than in a central portion.
1 more element
A piezoelectric resonator comprising:
- a substrate;
- vibration sections provided on the substrate;
- and
- frequency adjustment layers formed on the vibration sections in such a shape that in each of the frequency adjustment layers, adjustment material other than that corresponding to a plurality of small-area figures is removed and a mass per unit of the adjustment material not removed is larger in a peripheral portion than in a central portion.
1 more element
Dependencies are inferred from the claim text.