Boundary acoustic wave device and method for manufacturing the same
AssigneeMurata Manufacturing Co., Ltd.
InventorsDaisuke YAMAMOTO, Hajime KANDO, Akihiro TERAMOTO, Toshiyuki FUYUTSUME, Masahiko SAEKI
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Abstract
A boundary acoustic wave device includes a first medium, a second medium, and an IDT electrode disposed at an interface between the first medium and the second medium, the IDT electrode having an Au layer defining a main electrode layer, wherein a Ni layer is laminated so as to contact at least one surface of the Au layer, and a portion of Ni defining the Ni layer is diffused from the Ni layer side surface of the Au layer toward the inside of the Au layer.
Claims10
A boundary acoustic wave device comprising:
- a first medium;
- a second medium;
- and
- an IDT electrode disposed at an interface between the first medium and the second medium, the IDT electrode having an Au layer defining a main electrode layer;
- wherein
- the IDT electrode includes the Au layer and a Ni layer disposed so as to contact at least one surface of the Au layer;
- and
- a portion of Ni defining the Ni layer is diffused from the Ni layer side surface of the Au layer toward the inside of the Au layer.
A boundary acoustic wave device comprising:
- a first medium;
- a second medium;
- and
- an IDT electrode disposed at an interface between the first medium and the second medium, the IDT electrode having an Au layer defining a main electrode layer;
- wherein
- the IDT electrode includes the Au layer and a Ni layer disposed between the Au layer and the first medium so as to contact the Au layer;
- and
- a portion of Ni defining the Ni layer is diffused from the Ni layer side surface of the Au layer toward the inside of the Au layer.
A method for manufacturing a boundary acoustic wave device including a first medium, a second medium, and an IDT electrode disposed at an interface between the first medium and the second medium, the method comprising the steps of:
- forming an Au layer and a Ni layer disposed so as to contact at least one surface of the Au layer on a surface of one of the first medium and the second medium;
- laminating the other of the first medium and the second medium after the Au layer and the Ni layer are formed;
- and
- diffusing a portion of Ni defining the Ni layer into the Au layer by heating after the Au layer and the Ni layer are formed.
Dependencies are inferred from the claim text.