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US 2008/0290892 A1Published application
Evaluation device and evaluation method using evaluation device
AssigneeMitsubishi Electric Corporation
InventorsToru TAKEGUCHI, Kaoru Motonami
Life of this patent
Estimating the term…
Abstract
In an evaluation device a plurality of evaluation cells, a signal wiring for applying a voltage to the evaluation cells, and an output terminal pad for a signal taking out wiring for measuring outputs from the evaluation cells through a signal taking out wiring are provided on an insulating substrate. Thus, the in-plane distribution of electric characteristics can be easily measured. Further, the electric characteristics related to the particle diameter of the crystal of a poly-crystal silicon film are evaluated so that the in-plane unevenness of the particle diameter of the crystal of the poly-crystal silicon film can be managed.
Claims12
An evaluation device comprising:
- an insulating substrate;
- a plurality of evaluation cells arranged on the insulating substrate and respectively having thin film transistors;
- a first wiring that applies an electric signal to elements respectively;
- a second wiring that takes out electric outputs respectively from the elements;
- and
- a scanning wiring,
- wherein the plurality of evaluation cells are respectively electrically connected to the first wiring, the second wiring and the scanning wiring so that the plurality of evaluation cells are respectively connected together, and
- wherein terminal pads extending from the second wiring are provided on the insulating substrate.
5 more elements
An evaluation method using an evaluation device, the evaluation device comprising:
- an insulating substrate;
- a plurality of evaluation cells arranged on the insulating substrate and respectively having thin film transistors;
- a first wiring that applies an electric signal to elements respectively;
- a second wiring that takes out electric outputs respectively from the elements;
- and a scanning wiring, wherein the plurality of evaluation cells are respectively electrically connected to the first wiring, the second wiring and the scanning wiring so that the plurality of evaluation cells are respectively connected together, and wherein terminal pads extending from the second wiring are provided on the insulating substrate, the evaluation method comprising:
- applying a voltage to the thin film transistors through the first wiring;
- applying voltages of a plurality of voltage values to the thin film transistors through the scanning wiring;
- and
- measuring electric signals respectively outputted from the evaluation cells relative to the application of the voltages of the plurality of voltage values through the second wiring.
6 more elements
An evaluation method using an evaluation device comprising:
- an insulating substrate;
- a plurality of evaluation cells arranged on the insulating substrate and respectively having thin film transistors;
- a first wiring that applies an electric signal to elements respectively;
- a second wiring that takes out electric outputs respectively from the elements;
- and a scanning wiring, wherein the plurality of evaluation cells are respectively electrically connected to the first wiring, the second wiring and the scanning wiring so that the plurality of evaluation cells are respectively connected together, and wherein terminal pads extending from the second wiring are provided on the insulating substrate, the evaluation method comprising:
- applying a voltage to the scanning wiring;
- applying voltages of a plurality of voltage values to the thin film transistors through the first wiring;
- and
- measuring electric signals respectively outputted from the evaluation cells relative to the application of the plurality of voltages through the second wiring.
6 more elements
An evaluation method using an evaluation device comprising:
- an insulating substrate;
- a plurality of evaluation cells arranged on the insulating substrate and respectively having thin film transistors;
- a first wiring that applies an electric signal to elements respectively;
- a second wiring that takes out electric outputs respectively from the elements;
- and a scanning wiring, wherein the plurality of evaluation cells are respectively electrically connected to the first wiring, the second wiring and the scanning wiring so that the plurality of evaluation cells are respectively connected together, and wherein terminal pads extending from the second wiring are provided on the insulating substrate, the evaluation method comprising:
- applying a voltage to the thin film transistors through the first wiring;
- applying voltages of a plurality of voltage values to the thin film transistors through the scanning wiring;
- measuring current values respectively outputted from the evaluation cells relative to the application of the voltages of the plurality of voltage values through the second wiring;
- and
- calculating a value obtained by dividing the difference of the respectively outputted current values by the difference of the plurality of voltage values.
7 more elements
An evaluation method using an evaluation device comprising:
- an insulating substrate;
- a plurality of evaluation cells arranged on the insulating substrate and respectively having thin film transistors;
- a first wiring that applies an electric signal to elements respectively;
- a second wiring that takes out electric outputs respectively from the elements;
- and a scanning wiring, wherein the plurality of evaluation cells are respectively electrically connected to the first wiring, the second wiring and the scanning wiring so that the plurality of evaluation cells are respectively connected together, and wherein terminal pads extending from the second wiring are provided on the insulating substrate, the evaluation method comprising:
- applying a voltage to the thin film transistors through the scanning wiring;
- applying voltages of a plurality of voltage values to the thin film transistors through the first wiring;
- and
- measuring the capacities of the capacitors of the capacity elements relative to the application of the plurality of voltages through the second wiring.
6 more elements
Dependencies are inferred from the claim text.