Ac-excited microcavity discharge device and method

A method for manufacturing a microdischarge device, the method comprising:

• providing a conducting substrate, the substrate including at least one microcavity, the microcavity including an opening to a first face of the substrate;
• connecting an electrical contact to a second face of the substrate, forming a first electrode;
• depositing a first dielectric layer on the substrate and within the microcavity;
• providing a second electrode adjacent to the microcavity opening and disposed distally to the first dielectric layer;
• and
• filling the microcavity with a specified gas.

A microdischarge device comprising:

• a non-conducting substrate, the substrate including first and second faces, the substrate coated with a conducting layer on each face, thereby forming first and second electrodes;
• a microcavity opening to the first face of the substrate;
• a dielectric layer substantially coating the conducting layer and the microcavity on the first face;
• and
• a gas contained within the microcavity
• such that a microdischarge is produced upon application of a time-varying potential across the first and second electrodes.

A method for manufacturing a microdischarge device, the method comprising:

• providing a non-conducting substrate, the substrate including first and second faces, the substrate coated with a conducting layer on each face, thereby forming first and second electrodes;
• forming a microcavity in the first face of the substrate;
• substantially coating the conducting layer and the microcavity on the first face with a non-conducting layer;
• and
• filling the microcavity with a specified gas.

A microdischarge device comprising:

• a flexible non-conducting substrate having a lower face and an upper face, the lower face conductively coated, thereby forming a first electrode, and the upper face substantially parallel to the lower face, the substrate having a microcavity opening to the upper face of the substrate;
• a second electrode disposed above the upper face for application of a time-varying electrical potential across the first and second electrodes;
• a dielectric layer substantially coating the second electrode and the microcavity;
• and
• a gas contained within the microcavity for supporting a microdischarge upon application of the potential.