Stacked semiconductor device and method of testing the same
AssigneeElpida Memory, Inc.
InventorKayoko SHIBATA
Life of this patent
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Abstract
A stacked semiconductor device includes: an internal circuit; a through electrode provided to penetrate through a semiconductor substrate; a test wiring to which a predetermined potential different from a substrate potential is supplied at a time of a test; a first switch arranged between the through electrode and the internal circuit; a second switch arranged between the through electrode and the test wiring; and a control circuit that exclusively turns on the first and the second switches. Thereby, it becomes possible to perform an insulation test in a state that the through electrode and the internal circuit are cut off. Thus, even when a slight short-circuit that does not lead to a current defect occurs, the short circuit can be detected.
Claims14
A stacked semiconductor device, comprising:
- an internal circuit formed on a semiconductor substrate;
- at least one through electrode provided to penetrate through the semiconductor substrate;
- a test wiring to which a predetermined potential different from a substrate potential is supplied at a time of a test;
- a first switch arranged between the at least one through electrode and the internal circuit;
- a second switch arranged between the at lease one through electrode and the test wiring;
- and
- a control circuit that exclusively turns on the first and the second switches.
A testing method of a stacked semiconductor device including an internal circuit formed on a semiconductor substrate and a through electrode provided to penetrate through the semiconductor substrate, the method of a stacked semiconductor device comprising:
- a first step for supplying a predetermined potential different from a substrate potential to the through electrode, in a state that the through electrode and the internal circuit are cut off;
- and
- a second step of determining whether a current passes through the through electrode.
Dependencies are inferred from the claim text.