Method for fabricating a semiconductor device having embedded interconnect structures to improve die corner robustness
AssigneeTexas Instruments Incorporated
InventorJeffrey Alan West
Life of this patent
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Abstract
In a method for fabricating a semiconductor device a redundant scribe seal structure is formed. The semiconductor device includes a die having a rectangular shape with sloped corners. A scribe seal is formed to surround the die, the scribe seal having sides to form sloped corners that match the sloped corners of the die. A scribe seal extension having sharp corners is formed by extending the sides of the scribe seal that have a perpendicular orientation towards one another. The scribe seal extension redundantly encloses a corresponding one of the sloped corners of the scribe seal.
Claims21
A semiconductor device comprising:
- a die having sloped corners;
- a scribe seal formed around the perimeter of the die, the scribe seal having sides to form sloped corners that match the sloped corners of the die;
- and
- a scribe seal extension having sharp corners to redundantly enclose the sloped corners of the scribe seal, the sides of the scribe seal having a perpendicular orientation towards one another being extended to form the sharp corners.
A method for fabricating a semiconductor device having a redundant scribe seal, the method comprising:
- surrounding a die having sloped corners with a scribe seal, the scribe seal having sides to form sloped corners that match the sloped corners of the die;
- and
- extending the sides of the scribe seal to form a scribe seal extension in each virtual die corner, wherein the scribe seal extension redundantly encloses a corresponding one of the sloped corners of the scribe seal.
A scribe seal structure to protect a die, the die having a rectangular shape with sloped corners, the scribe seal structure comprising:
- a scribe seal formed along the perimeter of the die to surround the die, the scribe seal having sloped corners to match the sloped corners of the die;
- and
- a detached scribe seal having two sides that form a sharp corner, the detached scribe seal being separated from the scribe seal by a gap, wherein each one of the two sides of the detached scribe seal is aligned with a corresponding side of the scribe seal.
Dependencies are inferred from the claim text.