Organic transistor, method of forming organic transistor and organic el display with organic transistor

A method of manufacturing an organic transistor comprising the steps of:

• providing a layered structure including a substrate, a metal film formed on the substrate, and a negative type photosensitive resin film formed on the metal film;
• patterning the photosensitive resin film in two interdigitated shapes in which interdigitated fingers of the interdigitated shapes are engaged with each other, by irradiating a light upon the photosensitive resin film and developing the photosensitive resin film;
• forming an interdigitated source electrode part and an interdigitated drain electrode part by etching the metal film using the photosensitive resin film patterned into the interdigitated shapes, as masking films;
• eliminating a portion of the photosensitive resin film on the interdigitated electrode parts other than the lead segments of the interdigitated source electrode part and the interdigitated drain electrode part and the finger segments located at an end of each lead segment, by irradiating oxygen plasma or UV ozone onto the photosensitive resin film patterned into the interdigitated shapes;
• and
• forming, by coating, an organic semiconductor film using part of the photosensitive resin film remaining after the irradiation as a rib.