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AssigneeHitachi High-Technologies Corporation
InventorsYasuhira NAGAKUBO, Toshiaki Tanigaki, Katsuji Itou, Takashi Kanemura, Takayuki Asakawa
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The present invention achieves a heating stage for a micro-sample, capable of efficient heating and accurate observation of the micro-sample. A micro-sample mount is a heating portion in coil form and is fixed at both ends to a base for the heating stage for the micro-sample. The base can be divided into two members at a base cut line, and the mount is fixed at one end to the first member and is fixed at the other end to the second member. A sample subjected to micro-sampling is mounted on the mount. The base is removed from the tip of a holder, and is mounted on a stage for the sample stage. A current is fed to the micro-sample mount through the members to thereby apply heat to a micro-sample for observation.
A heating stage for a micro-sample, which supports the micro-sample for heating and observation of the micro-sample by any one of a transmission electron microscope and an ultra thin film evaluation instrument, comprising:
A sample fixing holder for a micro-sample, which supports the micro-sample for heating and observation of the micro-sample by any one of a transmission electron microscope and an ultra thin film evaluation instrument, comprising:
A heating stage for a micro-sample, which supports the micro-sample for heating and observation of the micro-sample by any one of a transmission electron microscope and an ultra thin film evaluation instrument, comprising:
A sample fixing holder for a micro-sample, which supports the micro-sample for heating and observation of the micro-sample by any one of a transmission electron microscope and an ultra thin film evaluation instrument, comprising:
Dependencies are inferred from the claim text.