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US 2008/0290288 A1Published application
Measurement System and a Method
AssigneeApplied Materials Israel Ltd.
InventorAviram Tam
Life of this patent
Estimating the term…
Abstract
The invention provides a method and a measurement system. The method includes: providing a measurement model that includes measurement image information; locating a measurement area image area by utilizing the measurement image information; and performing at least one measurement to provide measurement result information.
Claims30
A method, comprising:
- providing a measurement model that comprises measurement image information;
- locating a measurement area by utilizing the measurement image information;
- and performing at least one measurement to provide measurement result information.
A measurement system comprising:
- a scanner for scanning an measurement area with a beam of charged particles;
- a detector, positioned to receive charged particles resulting from an interaction between the measurement area and the beam of charged particles and to provide multiple detection signals;
- and a processor, adapted to process detection signals and to control the scanner;
- whereas the measurement system is adapted to receive a measurement model that comprises measurement image information;
- to locate a measurement area by utilizing the measurement image information;
- and to perform at least one measurement to provide measurement result information.
3 more elements
A measurement system comprising:
- a scanner for scanning an measurement area with a beam of charged particles;
- a detector, positioned to receive charged particles resulting from an interaction between the measurement area and the beam of charged particles and to provide multiple detection signals;
- and a processor, adapted to process detection signals and to control the scanner;
- whereas the measurement system is adapted to generate a measurement model that comprises measurement image information;
- to locate a measurement area by utilizing the measurement image information;
- and to perform at least one measurement to provide measurement result information.
3 more elements
Dependencies are inferred from the claim text.