Conversion apparatus, radiation detection apparatus, and radiation detection system
AssigneeCanon Kabushiki Kaisha
InventorsChiori Mochizuki, Keiichi Nomura, Minoru Watanabe, Takamasa Ishii
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Abstract
A conversion apparatus includes pixels including switching elements provided on an insulating substrate and conversion elements disposed over the switching elements and connected to the switching elements. Conductive lines are coupled to the pixels and have terminal elements for providing a connection to an external circuit. The terminal elements are disposed in a metal layer that is formed over the conversion elements. The conversion apparatus further includes a transparent conductive layer covering surfaces of the terminal elements, and a protective layer covering edges of the terminal elements and having openings.
Claims16
A method of manufacturing a conversion apparatus, the conversion apparatus including pixels having switching elements disposed over an insulating substrate and conversion elements disposed over the switching elements and coupled to the switching elements;
- and lines coupled to the pixels and having terminal elements to provide a connection to an external circuit, wherein the lines include bias lines disposed over the conversion elements and coupled to an external power source circuit for applying a bias voltage to the conversion elements, the method comprising:
- forming a metal layer covering the conversion elements and forming the terminal elements outside the pixels by the metal layer;
- forming a transparent conductive layer covering surfaces of the terminal elements;
- and
- forming a protective layer covering edges of the terminal elements and having openings.
A method of manufacturing a radiation detection apparatus, the radiation detection apparatus including pixels having switching elements coupled to conversion elements;
- terminal elements to provide connections to an external circuit;
- conductive lines coupled between the pixels and the terminal elements, the lines including bias lines coupled between the conversion elements and an external power source circuit to apply a bias voltage to the conversion elements;
- and a wavelength converter disposed over the conversion elements for converting incident radiation into visible light, the method comprising:
- forming a layer covering the conversion elements and forming the terminal elements outside the pixels by the layer.
A method of manufacturing an apparatus, the apparatus including pixels having switching elements coupled to conversion elements;
- terminal elements to provide a connection to an external circuit;
- and conductive lines coupled between the pixels and the terminal elements, the conductive lines including bias lines coupled between the conversion elements and an external power source circuit to apply a bias voltage to the conversion elements, the method comprising:
- the terminal elements are formed by a layer that is formed over a layer including the conversion elements.
Dependencies are inferred from the claim text.