Defect review method and device for semiconductor device

A defect review method for a semiconductor device, comprising the steps of:

• capturing images of a plurality of reviewing inspection areas on an inspection target sample to allow all of the inspection areas to fit in an electronic line scanning range of a scanning electron microscope being under first image-capturing conditions, and acquiring a plurality of images of the reviewing inspection areas;
• extracting, by comparison with design data, an abnormal section from the images of the inspection areas acquired by image capturing with the first image-capturing conditions;
• and
• capturing an image of the extracted abnormal section using the scanning electron microscope being under second image-capturing conditions, and acquiring an image of the abnormal section.

A defect review method for a semiconductor device, comprising the steps of:

• fitting a plurality of inspection areas on an inspection target sample in an electronic line scanning range of a scanning electron microscope, and capturing an image of each of the inspection areas with first image-capturing conditions;
• extracting, by comparison with design data, an abnormal section from the images of the inspection areas acquired by image capturing with the first image-capturing conditions;
• capturing an image of the extracted abnormal section using the scanning electron microscope being under second image-capturing conditions;
• classifying the image of the abnormal section being a result of image capturing with the second image-capturing conditions based on a result of comparison with the design data;
• measuring a size of a portion preset for every type of classification based on a result of classification;
• and
• displaying the result of classification and a result of size measurement together with the captured images.

A defect review apparatus for a semiconductor device, comprising:

• a scanning electron microscope provided with a table that is allowed to move in a plane with an inspection target sample placed thereon;
• image-capturing condition setting means for setting image-capturing conditions for reviewing the inspection target sample using the scanning electron microscope;
• table control means for controlling the table of the scanning electron microscope to allow a plurality of reviewing inspection areas on the inspection target sample to fit in an image capturing area of the scanning electron microscope being under first image-capturing conditions set by the image-capturing condition setting means;
• first image processing means for extracting, by comparison with design data, an abnormal section from images of the inspection areas acquired by the scanning electron microscope being under the first image-capturing conditions set by the image-capturing condition setting means;
• and
• second image processing means for processing an image of the extracted abnormal section in a state that the scanning electron microscope is set with second image-capturing conditions by the image-capturing condition setting means.

A defect review apparatus for a semiconductor device, comprising:

• scanning electron microscope means;
• image-capturing condition setting means for setting image-capturing conditions for reviewing an inspection target sample using the scanning electron microscope means;
• first image processing means for extracting, by comparison with design data, an abnormal section from images of a plurality of inspection areas on the inspection target sample acquired in a state that the scanning electron microscope means is set with first image-capturing conditions by the image-capturing condition setting means;
• and
• second image processing means for processing an image of the abnormal section extracted by the first image processing means in a state that the scanning electron microscope means is set with second image-capturing conditions by the image-capturing condition setting means, and measuring a size of a portion preset for every type of classification based on a classification result of the abnormal section.