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US 2008/0290264 A1Published application
Corrector for the correction of chromatic aberrations in a particle-optical apparatus
AssigneeFEI Company
InventorsAlexander Henstra, Michael Ross Scheinfein
Life of this patent
Estimating the term…
Abstract
The invention describes a corrector for the correction of chromatic aberrations in a particle lens, such as used in a SEM or a TEM. So as to reduce the stability demands on the power supplies of such a corrector, the energy with which the particle beam passes through the corrector is lower than the energy with which the beam passes through the lens to be corrected.
Claims19
A particle-optical apparatus arranged to focus a beam of electrically charged particles, provided with:
- a particle source for generating the beam;
- a particle-optical lens for focusing the beam;
- and,
- a corrector for correcting the chromatic lens errors occurring in the lens,
- characterized in that
- the beam traverses at least a portion of the corrector with an energy lower than the energy with which the beam traverses the lens.
3 more elements
A method of operating a charged particle beam, comprising:
- generating a beam of charged particles;
- correcting chromatic aberration of the beam of charged particles;
- focusing the beam of charged particles, the particles in the beam having lower energies when correcting the chromatic aberration than when being focused.
Dependencies are inferred from the claim text.