Ultrasonic Cleaning Method and Device

An ultrasonic cleaning method for cleaning an object to be cleaned by using an ultrasonic wave, the method comprising the steps of:

• putting cleaning fluid and the object to be cleaned in a cleaning tank;
• providing an ultrasonic vibration member having a structure in which an ultrasonic oscillator and a vibration portion disposed inside the cleaning tank are connected to each other, the vibration portion having a path inside that opens to the inside of the cleaning tank and providing two or more of the vibration portions so that directions of the ultrasonic wave radiated from the vibration portion differ from one another;
• and
• driving the ultrasonic vibration member to apply ultrasonic vibrations to the cleaning fluid and the object to be cleaned and supplying air containing ozone from the path to eject the air containing ozone from an opening portion of the path into the cleaning fluid and thereby to shatter bubbles of the air containing ozone to be micro bubbles by ultrasonic vibration.

An ultrasonic cleaning device comprising:

• a cleaning tank;
• an ultrasonic vibration member having a structure in which an ultrasonic oscillator and a vibration portion disposed inside the cleaning tank are connected to each other, the vibration portion having a path inside that opens to the inside of the cleaning tank;
• an ozone generation device for generating ozone from air;
• and
• an ozone supplying portion that supplies the air containing the ozone generated by the ozone generation device to the path,
• wherein the ultrasonic vibration member is driven to apply ultrasonic vibrations to the cleaning fluid and the object to be cleaned and air containing ozone is supplied from the path to eject the air containing ozone from an opening portion of the path into the cleaning fluid and thereby to shatter bubbles of the air containing ozone to be micro bubbles by ultrasonic vibration.

An ultrasonic cleaning device comprising:

• a cleaning tank;
• an ultrasonic wave unit that is structured to include a housing and an ultrasonic vibration member that has an ultrasonic oscillator disposed inside the housing and a vibration portion disposed on the circumference surface of the housing and has a path inside that opens to a surface of the vibration portion, the ultrasonic oscillator and the vibration portion being connected to each other, and the ultrasonic wave unit being soaked in the cleaning fluid inside the cleaning tank;
• an ozone generation device for generating ozone from air;
• and
• an ozone supplying portion that transfers the air containing the ozone generated by the ozone generation device and discharges the same from an opening portion of the path through the path into the cleaning fluid.