Substrate gripper with integrated electrical contacts
AssigneeLam Research Corporation
InventorsAleksander Owczarz, Robert Knop, Mike Ravkin, Carl A. Woods
Life of this patent
Estimating the term…
Abstract
A substrate holding and transporting assembly is disclosed. The substrate holding and transporting assembly includes a base plate and a pair of clamps connected to the base plate in a spaced apart orientation, the spaced apart orientation of the pair of clamps enable support of a substrate with at least two independent points. The substrate holding and transporting assembly also includes an electrode assembly connected to the base plate at a location that is substantially between the pair of clamps. The electrode assembly defined to impart an electrical contact to the substrate when present and held by the pair of clamps.
Claims20
A substrate holding and transporting assembly, comprising:
- a base plate;
- a pair of clamps connected to the base plate in a spaced apart orientation, the spaced apart orientation being defined to enable support of a substrate with at least two independent points, the at least two independent points being defined by each of the pair of clamps;
- and
- an electrode assembly being connected to the base plate at a location that is substantially between the pair of clamps, the electrode assembly defined to impart an electrical contact to the substrate when present and held by the pair of clamps.
A method for clamping and applying an electrical contact to a substrate, comprising:
- providing a clamping assembly having an integrated electrode assembly in a receiving position capable of being independently actuated into a closed position and at least two substrate clamps in a receiving position, the substrate clamps capable of being independently actuated into a clamping position;
- receiving the substrate at the clamping assembly;
- actuating the substrate clamps into the clamping position, the clamping position placing the substrate clamps in contact with the substrate;
- and
- actuating the electrode assembly into a closed positioned, the closed position placing a plurality of electrodes of the electrode assembly in contact with the substrate,
- wherein the plurality of electrodes that are in contact with the substrate apply the electrical contact.
A substrate handling assembly, comprising:
- a base plate;
- a first substrate clamp coupled to the base plate and having a clamping face configured to hold and accommodate a substrate when provided, the first substrate clamp having an open position and a closed position, the closed position being defined to secure the substrate;
- a second substrate clamp coupled to the base plate and having a clamping face configured to hold and accommodate a substrate when provided, and the second substrate clamp is spaced apart by a clamping distance from the first substrate clamp along the base plate to define support for the substrate, the second substrate clamp having an open position and a closed position, the closed position being defined to secure the substrate;
- and
- an electrode assembly connected to the base plate at a location that is substantially between the first and second substrate clamps, the electrode assembly having a plurality of electrodes, the electrode assembly having an open position and a closed position, the closed position being defined to transition the plurality of electrodes toward the base plate and in contact with the substrate when present.
Dependencies are inferred from the claim text.