Quartz glass crucible, process for producing the same, and use
AssigneeJapan Super Quartz Corporation
InventorsMinoru Kanda, Masaru Sato
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AssigneeJapan Super Quartz Corporation
InventorsMinoru Kanda, Masaru Sato
Estimating the term…
A crucible has a structure where a layer containing a crystallization accelerating component such as aluminum or the like (a crystallization accelerating layer) is inserted inside a quartz glass layer of a crucible straight body part excepting a crucible bottom part. The crucible does not deform and fall inwardly at the straight body part since a part containing a crystallization accelerating component advances to crystallize so as to increase strength at a high temperature when the crucible is used in pulling up silicon single crystal. Therefore, a single crystallization rate can be increased. Further, since the crystallization accelerating layer is inserted inside the quartz glass layer, the crystallization accelerating component, such as aluminum or barium, does not contact with silicon melt or a carbon susceptor, contamination by eluting these metals does not occurs. Further, since the crystallization accelerating layer is not provided at the crucible bottom part, there is no danger to crack due to thermal distortion at a time of pulling up silicon single crystal and melt leakage does not occur.
A quartz glass crucible used for pulling up silicon single crystal, wherein the crucible has a structure in which a layer containing a crystallization accelerating component (a crystallization accelerating layer) is inserted between an inner layer and an outer layer of a crucible straight body part except a crucible bottom part, and the crystallization accelerating layer is not formed at the crucible bottom part.
A production method of the quartz glass crucible produced by heating and melting a quartz powder stored at an inner surface of a rotary mold, the method comprising the steps of;
Dependencies are inferred from the claim text.