Angular velocity sensor

An angular velocity sensor, comprising:

• a quartz substrate in a flat plate shape being cut out from quartz single crystal rotated by a range of zero to one hundred eighty degrees around an X-axis from a crystal coordinate system (X, Y, Z) to a coordinate system (X, Y′, Z′), so that main surfaces are parallel with respect to the X-axis and a Z′-axis of the coordinate system (X, Y′, Z′);
• protrusions monolithically formed with the quartz substrate on both of the main surfaces so as to protrude in a Y′-axis direction and extend in an X-axis direction;
• an excitation electrode and a detection electrode formed adjacent to the protrusions on the main surfaces, wherein vibration is excited at the protrusions by exciting thickness-shear vibration in the X-axis direction on a portion having the excitation electrode and the detection electrode formed on the quartz substrate by an electric filed applied to the excitation electrode, and the protrusions are bent by Coriolis force acting corresponding to a rotation around a Y′-axis and displacement thereof is transmitted to the quartz substrate, so that the detection electrode detects change of stress applied to the quartz substrate.