Method of manufacturing a semiconductor device

A method of manufacturing a semiconductor device comprising the steps of:

• (a) providing a wiring substrate having a main surface, a plurality of device areas formed on the main surface, a back surface opposite the main surface, and a dicing area arranged between the plurality of device areas;
• (b) after step (a), fixing a plurality of semiconductor chips on the plurality of device areas, respectively;
• (c) after step (b), forming a block sealing member over the main surface of the wiring substrate, the block sealing member covering the plurality of semiconductor chips;
• (d) after step (c), attaching a plurality of external terminals on the back surface of the wiring substrate such that the plurality of external terminals are corresponding to the plurality of device areas, respectively;
• (e) after step (d), disposing the wiring substrate over a dicer cutting stage by way of a substrate holding jig, the substrate holding jig having a product support portion, the product support portion having a groove corresponding to the dicing area of the wiring substrate, and a plurality of through holes corresponding to the plurality of device areas of the wiring substrate, respectively;
• and
• (f) after step (e), dividing the block sealing member and the wiring substrate by running a dicing blade from the back surface of the wiring substrate and along the dicing area while chucking an upper surface of the block sealing member by way of a chucking hole formed on the dicer cutting stage and the plurality of through holes formed on the product support portion,
• wherein, in step (e), the wiring substrate is disposed over the substrate holding jig such that the upper surface of the block sealing member faces the product support portion, and
• wherein, in step (e), the wiring substrate is disposed over the substrate holding jig such that the groove and the plurality of through holes correspond to the dicing area and the plurality of device areas, respectively.