Porous particles and methods of making thereof
AssigneesBoard of Regents, The University of Texas System, The Ohio State University Research Foundation
InventorsMauro Ferrari, Xuewu Liu, Ming-Cheng Cheng
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Abstract
Provided is a particle that includes a first porous region and a second porous region that differs from the first porous region. Also provided is a particle that has a wet etched porous region and that does have a nucleation layer associated with wet etching. Methods of making porous particles are also provided.
Claims61
A particle comprising a body defined by an outer surface, wherein the body comprises a first porous region and a second porous region that differs from the first region in at least one property selected from the group consisting of a pore density, a pore size, a pore shape, a pore charge, a pore surface chemistry, and a pore orientation.
A composition comprising a plurality of particles, wherein each particle of the plurality comprises a body defined by an outer surface, wherein the body comprises a first porous region and a second porous region that differs from the first region in at least one property selected from the group consisting of a pore density, a pore size, a pore shape, a pore charge, a pore surface chemistry, and a pore orientation.
A particle comprising a body defined by an outer surface, wherein the body comprises a wet etched porous region and wherein the particle does not include a nucleation layer associated with wet etching.
A composition comprising a plurality of particles that each have a body defined by an outer surface, wherein the body comprises a wet etched porous region and wherein the particle does not include a nucleation layer associated with wet etching.
A method of making porous particles comprising:
- providing a substrate having a surface;
- forming a first porous layer in the substrate;
- patterning one or more particles on the substrate;
- forming in the substrate a second porous layer having a porosity larger than that of the first porous layer;
- and
- releasing the patterned one or more particles from the substrate, wherein the releasing comprises breaking the second porous layer and wherein the released one or more particles contain at least a portion of the first porous layer.
A method of making porous particles comprising:
- providing a substrate having a surface;
- forming a first porous layer in the substrate via electrochemical wet etching;
- removing a nucleation layer associated with the electrochemical wet etching;
- patterning one or more particles on the surface of the substrate;
- and
- releasing the patterned one or more particles from the substrate, wherein the released one or more particles contain at least a portion of the first porous layer.
Dependencies are inferred from the claim text.