Multi-laser system
AssigneeEo Technics Co., Ltd.
InventorKyu Dong SUNG
Life of this patent
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Abstract
A multi-laser system including a first laser oscillator for emitting a first laser beam, a second laser oscillator for emitting a second laser beam, a first scanner pair for receiving the first laser beam emitted by the first laser oscillator and deflecting the incident first laser beam to a desired location on a substrate to be processed, a second scanner pair for receiving the second laser beam emitted by the second laser oscillator and deflecting the incident second laser beam to a desired location on the substrate to be processed, and a scan lens for receiving laser beams that have been deflected from the first and second scanner pairs, focusing the received laser beams to spots having predetermined diameters so as to radiate the spots on the substrate.
Claims6
A multi-laser system comprising:
- a first laser oscillator emitting a first laser beam;
- a second laser oscillator emitting a second laser beam;
- a first scanner pair receiving the first laser beam emitted by the first laser oscillator and deflecting the incident first laser beam to a desired location on a substrate to be processed;
- a second scanner pair receiving the second laser beam emitted by the second laser oscillator and deflecting the incident second laser beam to a desired location on the substrate to be processed;
- and
- a scan lens receiving laser beams that have been deflected from the first and second scanner pairs, focusing the received laser beams to spots having predetermined diameters so as to radiate the spots on the substrate.
Dependencies are inferred from the claim text.