Microelectromechanical system having a dielectric movable membrane and a mirror
AssigneeQUALCOMM Incorporated
InventorTeruo Sasagawa
Life of this patent
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Abstract
A microelectromechanical (MEMS) device includes at least one electrode, a first reflective layer, and a movable functional element. The movable functional element includes a flexible dielectric layer and a reflective element. The flexible dielectric layer flexes in response to voltages applied to the at least one electrode to move the functional element in a direction generally perpendicular to the first reflective layer. The reflective element has a first portion mechanically coupled to the flexible dielectric layer and a second portion spaced from the flexible dielectric layer and defining a gap therebetween.
Claims43
A microelectromechanical (MEMS) device comprising:
- at least one electrode;
- a first reflective layer;
- and
- a movable functional element comprising:
- a flexible dielectric layer that flexes in response to voltages applied to the at least one electrode to move the functional element in a direction generally perpendicular to the first reflective layer;
- and
- a reflective element having a first portion mechanically coupled to the flexible dielectric layer and a second portion spaced from the flexible dielectric layer and defining a gap therebetween.
A microelectromechanical (MEMS) device comprising:
- first means for reflecting;
- means for moving a portion of the device, the moving means comprising:
- second means for reflecting;
- and
- means for supporting the second reflecting means, a first portion of the supporting means mechanically coupled to the second reflecting means and a second portion of the supporting means spaced from the second reflecting means and defining a gap therebetween, the supporting means having a flexible dielectric portion;
- and
- means for actuating the moving means to move the second reflecting means in a direction generally perpendicular to the first reflecting means.
A method of manufacturing a microelectromechanical (MEMS) device, the method comprising:
- providing a first reflective layer;
- forming a first sacrificial layer over the first reflective layer;
- forming a functional element over the first sacrificial layer, wherein forming the functional element comprises:
- forming a reflective element over the first sacrificial layer, the reflective element having a reflective surface substantially parallel to the first reflective layer;
- forming a second sacrificial layer over the reflective element;
- forming an aperture through the second sacrificial layer and over the reflective element;
- and
- forming a flexible dielectric layer over the second sacrificial layer, the flexible dielectric layer mechanically coupled to the reflective element through the aperture;
- and
- removing the first and second sacrificial layers such that the functional element is movable in a direction generally perpendicular to the first reflective layer.
A microelectromechanical (MEMS) device comprising:
- at least one electrode;
- a first reflective layer;
- and
- a movable functional element comprising:
- a flexible layer that flexes in response to voltages applied to the at least one electrode to move the functional element in a direction generally perpendicular to the first reflective layer;
- and
- a reflective element having a first portion mechanically coupled to the flexible layer and a second portion spaced from the flexible layer and defining a gap therebetween, the reflective element comprising:
- a second reflective layer;
- an electrically conductive layer in electrical communication with the second reflective layer via a communication path;
- and
- a dielectric layer between the second reflective layer and the electrically conductive layer.
A microelectromechanical (MEMS) device comprising:
- first means for reflecting;
- means for moving a portion of the device, the moving means comprising:
- second means for reflecting, the second reflecting means including a dielectric portion;
- and
- means for supporting the second reflecting means, a first portion of the supporting means mechanically coupled to the second reflecting means and a second portion of the supporting means spaced from the second reflecting means and defining a gap therebetween;
- and
- means for actuating the moving means to move the second reflecting means in a direction generally perpendicular to the first reflecting means.
Dependencies are inferred from the claim text.