Field effect transistor
AssigneeKabushiki Kaisha Toshiba
InventorMasaki KOBAYASHI
Life of this patent
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Abstract
A field effect transistor includes a channel region fabricated on a compound semiconductor substrate, a gate electrode fabricated on the channel region, a source electrode and a drain electrode alternately arranged on the channel region with a gate electrode interposed between the source electrode and the drain electrode, a bonding pad to be connected with an external circuit; and an air-bridge connected with the bonding pad, the air-bridge having an electrode contact terminal to be connected with the source electrode or the drain electrode and an aerial circuit line for connecting the electrode contact terminal with a contact terminal of the bonding pad, the widthwise cross sectional area of the electrode contact terminal being equal to or less than that of the aerial circuit line.
Claims14
A field effect transistor comprising:
- a channel region fabricated on a compound semiconductor substrate;
- a gate electrode fabricated on the channel region;
- a source electrode and a drain electrode alternately arranged on the channel region with a gate electrode interposed between the source electrode and the drain electrode,
- a bonding pad to be connected with an external circuit;
- and
- an air-bridge connected with the bonding pad, the air-bridge having an electrode contact terminal to be connected with the source electrode or the drain electrode and an aerial circuit line for connecting the electrode contact terminal with a contact terminal of the bonding pad, the widthwise cross sectional area of the electrode contact terminal being equal to or less than that of the aerial circuit line.
A field effect transistor comprising:
- a channel region fabricated on a compound semiconductor substrate;
- a gate electrode fabricated on the channel region;
- a source electrode and a drain electrode alternately arranged on the channel region with a gate electrode interposed between the source electrode and the drain electrode,
- a bonding pad to be connected with an external circuit;
- and
- an air-bridge connected with the bonding pad, the air-bridge having an electrode contact terminal to be connected with the source electrode or the drain electrode and an aerial circuit line for connecting the electrode contact terminal with a contact terminal of the bonding pad, the width of the electrode contact terminal being narrower than that of the aerial circuit line.
Dependencies are inferred from the claim text.