Light emitting device and method for making the same
AssigneeHuga Optotech Inc.
InventorTzong-Liang Tsai
Life of this patent
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Abstract
A light emitting diode includes: an epitaxial substrate having a roughened side and formed with alternately disposed ridges and valleys at the roughened side, each of the ridges having a roughened surface that is formed with a dense concentration of alternately disposed pits and protrusions; and an epitaxial layered structure formed on and covering the ridges and the valleys of the epitaxial substrate. A method for making the light emitting diode involves forming the epitaxial substrate with the ridges and valleys prior to the formation of the epitaxial layered structure.
Claims45
A light emitting diode comprising:
- an epitaxial substrate having a roughened side and formed with alternately disposed ridges and valleys at said roughened side, each of said ridges having a roughened surface that is formed with a dense concentration of alternately disposed pits and protrusions;
- and
- an epitaxial layered structure formed on and covering said ridges and said valleys of said epitaxial substrate.
A method for making a light emitting diode, comprising:
- (a) forming a mask layer on an epitaxial substrate;
- (b) roughening the mask layer so as to form the mask layer with alternately disposed mask ridges and mask valleys;
- (c) anisotropically etching the roughened mask layer and the underlying epitaxial substrate in such a manner to remove the entire roughened mask layer from the epitaxial substrate and to roughen the epitaxial substrate so as to form the epitaxial substrate with alternately disposed substrate ridges and substrate valleys, which correspond respectively to the mask ridges and the mask valleys, such that each of the substrate ridges has a roughened surface that is formed with a dense concentration of alternately disposed pits and protrusions;
- and
- (d) forming an epitaxial layered structure on the substrate ridges and the substrate valleys of the epitaxial substrate.
A method for making a light emitting diode, comprising:
- (a) roughening an epitaxial substrate through techniques selected from the group consisting of sandblasting techniques and mechanical polishing techniques so as to form the epitaxial substrate with alternately disposed ridges and valleys such that each of the ridges has a roughened surface that is formed with a dense concentration of alternately disposed pits and protrusions;
- and
- (b) forming an epitaxial layered structure on the ridges and the valleys of the epitaxial substrate.
Dependencies are inferred from the claim text.