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US 2008/0277584 A1Published application
Method for Changing Energy of Electron Beam in Electron Column
OwnerHo Seob Kiminventor
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Abstract
The present invention relates to a method of effectively changing the energy of an electron beam in an electron column for generating an electron beam. This includes the step of additionally applying voltage to an electrode such that the electron beam finally has the desired energy so as to freely control the energy when the electron beam reaches a sample.
Claims9
1-5. (canceled)
A method of changing energy of an electron beam of an electron column, comprising the step of additionally applying voltage to an electrode such that the electron beam finally has desired energy so as to freely control energy thereof when the electron beam reaches a sample.
Dependencies are inferred from the claim text.