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US 2008/0277381 A1Published application
Etching Solutions
AssigneeInktec Co., Ltd.
InventorsKwang-Choon Chung, Hyun-Nam Cho, Young-Kwan Seo
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Abstract
The present invention provides an etching solution for silver or silver alloy comprising one at least ammonium compound represented by the formula (1), (2) or (3) below and an oxidant.
Claims14
An etching solution for silver or silver alloy comprising at least one ammonium compound represented by the formula (1), (2) or (3) below and an oxidant:
- each of R1, R2, R3, R4, R5 and R6 is, independently, selected from hydrogen;
- substituted or unsubstituted C1-C30 aliphatic alkyl, alicyclic alkyl, aryl or aralkyl;
- a polymer compound;
- a heterocyclic compound;
- and derivatives thereof and R1 and R2 or R4 and R5 may be connected to form a ring.
2 more elements
Dependencies are inferred from the claim text.