Adaptor for Microscope and Microscope Apparatus (Microscope-Use Adaptor and Microscope Device)

An adaptor for a microscope, attached detachably to between a liquid immersion objective lens for said microscope that inspects an external appearance of a specimen and the specimen, said adaptor comprising:

• a connecting portion connecting with said microscope;
• inclined faces provided in the periphery of a front edge of said liquid immersion objective lens and provided respectively in two positions adjacent to the front edge in directions getting closer to an image side of said liquid immersion objective lens as it gets farther away from the front edge thereof;
• protruded portions provided in positions adjacent to said inclined faces and protruding toward an object side of said liquid immersion objective lens from said inclined faces;
• and
• an aperture portion formed, one of said two inclined faces extending from the front edge to a side face of said liquid immersion objective lens, so as to be surrounded by said protruded portions and the specimen at a portion leading to the side face of said liquid immersion objective lens.

A microscope apparatus comprising:

• support means supporting a substrate as an observation object;
• an objective lens belonging to a liquid immersion system;
• discharging means discharging a liquid to between a front edge of said objective lens and said substrate;
• and
• sucking means sucking the liquid from said substrate,
• wherein inclined faces are provided in the periphery of the front edge of said objective lens respectively in two positions adjacent to the front edge in directions getting closer to an image side of said objective lens as it gets farther away from the front edge thereof;
• and protruded portions are provided in positions adjacent to said inclined faces and protruding toward an object side of said objective lens from said inclined faces,
• one of said two inclined faces extends from the front edge to a side face of said objective lens, an aperture portion surrounded by said protruded portions and said substrate is formed at a portion leading to the side face, said discharging means includes a first tubular member provided on said one inclined surface, a width of said first tubular member is narrower than a width of said one inclined face, and the liquid is discharged by use of said first tubular member, and
• said sucking means includes a second tubular member provided on said other inclined face of said two inclined faces, a width of said second tubular member is larger than the width of said first tubular member, and the liquid is sucked while taking in the air from said aperture portion by use of said second tubular member.

An adaptor for a microscope, attached detachably to a liquid immersion objective lens for said microscope that inspects an external appearance of a specimen, said adaptor comprising:

• a connecting portion connecting with said microscope;
• liquid supplying means directly supplying a liquid to a portion where an external appearance inspection is carried out;
• a liquid holding portion holding the liquid between said liquid immersion objective lens and said specimen;
• and
• a first path used for eliminating the liquid from said liquid holding portion.

A microscope apparatus comprising:

• a microscope including a stage holding a specimen, a liquid immersion objective lens, liquid supplying means supplying the liquid to between a front edge of said liquid immersion objective lens and the specimen, and liquid eliminating means eliminating the liquid;
• and
• an adaptor for a microscope, including a connecting portion connecting to said liquid immersion objective lens or said microscope, a liquid holding portion holding the liquid between said liquid immersion objective lens and the specimen, and a first path whose one end is connected to the liquid eliminating means and used for eliminating the liquid from said liquid holding portion,
• wherein the liquid is directly supplied to a portion where observation of the sample is carried out.