US 2008/0259442 A1 · Scanning microscope and adjusting method for the same

Abstract

A scanning microscope includes an objective lens for focusing illumination light onto a specimen; a scanning device for deflecting and scanning the illumination light; a pupil-projection optical system for illuminating a pupil of the objective lens with the scanned illumination light; and a total-magnification specifying unit for specifying a total magnification. An optical-system selecting unit changes at least one of the objective lens and the pupil-projection optical system such that a magnification of an optical system including the objective lens and the pupil-projection optical system is equal to or less than the total magnification specified by the total-magnification specifying unit and that the numerical aperture of the optical system is maximized. A deflection-angle determination unit determines a deflection angle of the illumination light deflected by the scanning device based on the ratio of the magnification of the optical system to the total magnification to achieve the total magnification.

Claims9

Dependent claims

A scanning microscope comprising:

an objective lens configured to focus illumination light onto a specimen;
scanning device for deflecting and scanning the illumination light;
a pupil-projection optical system configured to illuminate a pupil of the objective lens with the illumination light scanned by the scanning device;
a total-magnification specifying unit configured to specify a total magnification,
an optical-system selecting unit configured to change at least one of the objective lens and the pupil-projection optical system in such a manner that a magnification of an optical system including the objective lens and the pupil-projection optical system is equal to or less than the total magnification specified by the total-magnification specifying unit and that the numerical aperture of the optical system is maximized;
and
a deflection-angle determination unit configured to determine a deflection angle of the illumination light deflected by the scanning device on the basis of the ratio of the magnification of the optical system to the total magnification so as to achieve the total magnification.

4 more elements

An adjusting method for a scanning microscope including an objective lens configured to focus illumination light onto a specimen, scanning device for deflecting and scanning the illumination light, and a pupil-projection optical system configured to illuminate a pupil of the objective lens with the illumination light scanned by the scanning device, the adjusting method for the scanning microscope comprising:

specifying a total magnification;
changing at least one of the objective lens and the pupil-projection optical system in such a manner that a magnification of an optical system including the objective lens and the pupil-projection optical system is equal to or less than the total magnification specified and that a numerical aperture of the optical system is maximized;
and
determining a deflection angle of the illumination light deflected by the scanning device on the basis of the ratio of the magnification of the optical system to the total magnification so as to achieve the total magnification.

1 more element

Dependencies are inferred from the claim text.

Scanning microscope and adjusting method for the same

Life of this patent

Scanning microscope and adjusting method for the same

Life of this patent

Abstract

Claims9