Imaging System
AssigneeCarl Zeiss SMT GmbH
InventorsDavid Shafer, Aurelia Dodoc, Karl-Heinz Schuster
Life of this patent
Estimating the term…
Loading patent…
AssigneeCarl Zeiss SMT GmbH
InventorsDavid Shafer, Aurelia Dodoc, Karl-Heinz Schuster
Estimating the term…
An imaging system for imaging an object field arranged in an object surface of the imaging system onto an image field arranged in an image surface of the optical system while creating at least one intermediate image including: a first imaging subsystem for creating the intermediate image from radiation coming from the object surface, the first imaging subsystem having a first optical axis; and a second imaging subsystem different in construction from the first imaging subsystem for imaging the intermediate image onto the image surface, the second imaging subsystem having a second optical axis; wherein the first optical axis is offset with respect to the second optical axis by an axis offset at the intermediate image and wherein the intermediate image has a correction status adapted to the axis-offset such that the correction status of the image field is essentially free from aberrations caused by the axis-offset.
An imaging system comprising:
Dependencies are inferred from the claim text.