Photodetector and Spectrometer Using the Same
AssigneeHamamatsu Photonics K.K.
InventorsMitsuaki Kageyama, Katsumi Shibayama, Seiichiro Mizuno, Helmut Teichmann, Dietmar Hiller, Ulrich Starker
Life of this patent
Estimating the term…
Loading patent…
AssigneeHamamatsu Photonics K.K.
InventorsMitsuaki Kageyama, Katsumi Shibayama, Seiichiro Mizuno, Helmut Teichmann, Dietmar Hiller, Ulrich Starker
Estimating the term…
A photodiode array, having a plurality of photodiodes 12 (n-type channel regions 121), and a light entrance portion 13, formed of an opening that is used to make light to be detected by photodiodes 12 enter, are provided in a substrate 10 of a photodetector 1A having an n-type substrate 101 and a p-type epitaxial layer 102. Furthermore, a carrier capturing portion 60, for capturing carriers generated at a substrate portion near the light entrance portion 13 and removes the captured carriers to the exterior via an electrode 61, is arranged from a layer portion of the epitaxial layer 102 that is positioned between the photodiode array 11 and the light entrance portion 13. A photodetector of a simple arrangement, which, when applied to a spectrometer, enables the positioning precision of components of the spectrometer to be improved, and a spectrometer using this photodetector are thus realized.
1:
2:
3:
4:
5:
6: