Exposure apparatus, temperature regulating system, and device manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorShintaro Aichi
Life of this patent
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Abstract
An exposure apparatus which includes a plurality of units to be temperature-regulated, and transfers a pattern of a reticle onto a substrate while activating the plurality of units is disclosed. The exposure apparatus comprising a plurality of flow passages which run parallel to each other and through which a fluid to temperature-regulate the plurality of units flows, a bypass line which runs parallel to the plurality of flow passages so as to bypass the plurality of flow passages, and a flow rate controller configured to control a flow rate of fluid flowing through the bypass line, so that a total flow rate of the fluid flowing through the plurality of flow passages and the bypass line becomes a target flow rate.
Claims7
An exposure apparatus which includes a plurality of units to be temperature-regulated, and transfers a pattern of a reticle onto a substrate while activating the plurality of units, the exposure apparatus comprising:
- a plurality of flow passages which run parallel to each other and through which a fluid to temperature-regulate the plurality of units flows;
- a bypass line which runs parallel to said plurality of flow passages so as to bypass said plurality of flow passages;
- and
- a flow rate controller configured to control a flow rate of fluid flowing through said bypass line, so that a total flow rate of the fluid flowing through said plurality of flow passages and said bypass line becomes a target flow rate.
A temperature regulating system comprising:
- a plurality of flow passages which run parallel to each other and through which a fluid to temperature-regulate a plurality of units flows;
- a bypass line which runs parallel to said plurality of flow passages so as to bypass said plurality of flow passages;
- and
- a flow rate controller which controls a flow rate of fluid flowing through said bypass line, so that a total flow rate of the fluid flowing through said plurality of flow passages and said bypass line becomes a target flow rate.
Dependencies are inferred from the claim text.