Monolithic fluid injection device and method for fabricating and operating thereof
AssigneeQisda Corporation
InventorsChung-Cheng Chou, Wai Wang
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Abstract
The invention provides a monolithic fluid injection device and method for fabricating and operating thereof. The device comprises a substrate and a structural layer disposed thereon to form a fluid chamber therebetween for storing a fluid therein. The device further comprises a liquid level control unit formed on the structural layer and a nozzle passed through the liquid level control unit and structural layer to communicate with the fluid chamber. The liquid level control unit adjusts liquid level of fluid in the nozzle to eject a droplet with various volume and direction.
Claims20
A monolithic fluid injection device, comprising:
- a substrate;
- a structural layer disposed on the substrate and a fluid chamber formed therebetween to store a fluid;
- a liquid level control unit formed on the structural layer;
- and
- a nozzle passed through the liquid level control unit and the structural layer to communicate with the fluid chamber.
A method for fabricating a monolithic fluid injection device, comprising:
- providing a substrate;
- forming a structural layer on the substrate and a fluid chamber therebetween to store a fluid;
- forming a liquid level control unit on the structural layer;
- and
- forming a nozzle in the liquid level control unit and the structural layer to communicate with the fluid chamber.
A method for operating a monolithic fluid injection device comprising a first liquid level control unit having a first electrode contacted to a fluid in the device and a second electrode wrapped around by a first dielectric layer, and a first nozzle passed through the liquid level control unit, the method comprising:
- providing a voltage having a first polarity to the fluid by the first electrode;
- providing a voltage having a second polarity opposite the first polarity to the first dielectric layer to control a liquid level of the fluid in the first nozzle;
- and
- providing a bubble to the fluid so as to eject a first droplet from the first nozzle.
Dependencies are inferred from the claim text.