Low energy, long life micro-fluid ejection device
AssigneeLexmark International, Inc.
InventorsRobert W. CORNELL, James Harold POWERS, Shirish Padmakar MULAY, Robert L. CORNELL
Life of this patent
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AssigneeLexmark International, Inc.
InventorsRobert W. CORNELL, James Harold POWERS, Shirish Padmakar MULAY, Robert L. CORNELL
Estimating the term…
Micro-fluid ejection heads and methods for extending the life of micro-fluid ejection heads. One such micro-fluid ejection head includes a substrate having a plurality of thermal ejection actuators. Each of the thermal ejection actuators has a resistive layer and a protective layer thereon. A flow feature member is adjacent the substrate and defines a fluid feed channel, a fluid chamber associated with at least one of the actuators and in flow communication with the fluid feed channel, and a nozzle. The nozzle is offset to a side of the chamber opposite the feed channel. A polymeric layer having a degradation temperature of less than about 400° C. overlaps a portion of the at least one actuator associated with the fluid chamber and positioned less than about five microns from at least an edge of the at least one actuator opposite the fluid feed channel.
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The micro-fluid ejection head of claim 21, wherein the resistive layer has a thickness ranging from about 300 to about 1000 Angstroms.
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The micro-fluid ejection head of claim 21, wherein the protective layer has a thickness ranging from about 900 to about 5500 Angstroms.
The micro-fluid ejection head of claim 21, wherein the resistive layer comprises a tantalum-aluminum alloy and the protective layer comprises a material selected from the group consisting of diamond like carbon, silicon doped diamond like carbon, silicon nitride, silicon carbide, titanium, tantalum, and an oxidized metal layer.
The micro-fluid ejection head of claim 21, wherein the polymeric layer comprises a cross-linked epoxy material.
The micro-fluid ejection head of claim 21, wherein the polymeric layer overlaps opposing edges of the thermal ejection actuators in an amount ranging from about 1 to about 4 microns.
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The micro-fluid ejection head of claim 21, wherein the actuators are elongate actuators having a length to width ratio ranging from about 1.5:1 to about 5:1.
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The method of claim 25, wherein the flow feature layer comprises a polymeric thick film layer.
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The method of claim 24, wherein the polymeric layer comprises a planarization layer having a thickness ranging from about 1 to about 6 microns.
The method of claim 24, wherein the polymeric layer is deposited so that the polymeric layer overlaps opposing edge portions of the thermal ejection actuators.
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A micro-fluid ejection head made by the method of claim 24.
A micro-fluid ejection head having improved thermal ejection actuator life, comprising:
A method for extending a life of thermal ejection actuators for a micro-fluid ejection head comprising:
Dependencies are inferred from the claim text.