Passive electrically testable acceleration and voltage measurement devices
AssigneeInternational Business Machines Corporation
InventorsToshiharu Furukawa, Mark Charles Hakey, Steven John Holmes, David Vaclav Horak, Charles William Koburger, Leah Marie Pfeifer Pastel
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Abstract
Acceleration and voltage measurement devices and methods of fabricating acceleration and voltage measurement devices. The acceleration and voltage measurement devices including an electrically conductive plate on a top surface of a first insulating layer; a second insulating layer on a top surface of the conductive plate, the top surface of the plate exposed in an opening in the second insulating layer; conductive nanotubes suspended across the opening, and electrically conductive contacts to said nanotubes.
Claims12
A device, comprising:
- an electrically conductive plate on a top surface of a first insulating layer;
- a second insulating layer on a top surface of said conductive plate, said top surface of said plate exposed in an opening in said second insulating layer;
- one or more sets of one or more of electrically conductive nanotubes, distal first and second end regions of said nanotubes in contact with said second insulating layer, middle regions of said nanotubes suspended across said opening, nanotubes in different sets of said one or more nanotubes not in electrical contact with each other;
- and
- one or more electrically conductive contacts, each of said one or more contacts in electrical contact with first end regions of nanotubes of different sets of said one or more nanotubes.
A device, comprising:
- one or more electrically conductive plates on a top surface of a first insulating layer;
- a second insulating layer on top surfaces of said conductive plates, said top surfaces of said conductive plates exposed in an opening in said second insulating layer over each said conductive plate;
- an electrically conductive mat of nanotubes suspended across said openings;
- and
- an electrically conductive contact contacting said mat of nanotubes.
Dependencies are inferred from the claim text.