Semiconductor device and method of manufacturing the same
AssigneeRenesas Technology Corp.
InventorsYusuke Morita, Yoshinobu Kimura, Ryuta Tsuchiya, Nobuyuki Sugii, Shinichiro Kimura
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AssigneeRenesas Technology Corp.
InventorsYusuke Morita, Yoshinobu Kimura, Ryuta Tsuchiya, Nobuyuki Sugii, Shinichiro Kimura
Estimating the term…
A MIS transistor having an inclined stacked source/drain structure increased in speed is provided. The MIS transistor comprises: a gate electrode formed on a substrate; a first sidewall insulating film formed on the substrate and along a sidewall of the gate electrode; source/drain semiconductor regions formed on a main surface of the substrate and respectively having one edge positioned under the sidewall of the gate electrode; a first stacked layer formed on the source/drain semiconductor regions and in contact with the first sidewall insulating film; a second sidewall insulating film formed on the stacked layer and in contact with the first sidewall insulating film; and a second stacked layer formed on the first stacked layer and in contact with the second sidewall insulating layer.
A semiconductor device comprising a MIS transistor formed on a main surface of a semiconductor substrate, the semiconductor device including:
A semiconductor device comprising a MIS transistor formed on a main surface of a semiconductor substrate, the semiconductor device including:
11-20. (canceled)
Dependencies are inferred from the claim text.