Temperature control method, temperature control apparatus and high/low temperature processing system

A high/low temperature processing system that controls a temperature of a target object by circulating one type of cooling liquid into and out of a processing unit to perform a heat exchange between the cooling liquid and the target object when the processing unit performs a specific process on the target object in a high temperature or in a low temperature range, the system comprising:

• a cooling device that cools the cooling liquid, and circulates the cooing liquid into and out of the processing unit;
• and
• a pressurizing/heating device that increases a boiling point of the cooling liquid, heats the cooling liquid whose boiling point has been increased, and circulates the cooling liquid into and out of the processing unit,
• wherein the pressurizing/heating device is used while the specific process is being performed on the target object in the high temperature range, and the cooling device is used while the specific process is being performed on the target object in the low temperature range.

A temperature control method for controlling a temperature of a target object by a heat exchange between a temperature control liquid and the target object, the method comprising:

• increasing a boiling point of the temperature control liquid by pressurizing the temperature control liquid;
• increasing a temperature of the temperature control liquid to become higher than or equal to a boiling point of the temperature control liquid observed at a normal pressure;
• and
• performing a heat exchange between the target object and the temperature control liquid whose temperature has been increased to become higher than or equal to the boiling point of the temperature control liquid observed at the normal pressure.