Recipe-and-component control module and methods thereof
AssigneeLam Research Corporation
InventorsChung-Ho Huang, Andrew Lui
Life of this patent
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Abstract
A recipe-and component control module (RACCM) is provided. The RACCM is a server for performing data management in a plasma processing system with a plurality of components. The RACCM includes a plurality of intelligent agents. Each intelligent agent of the intelligent agents is configured to interact with each component of the plurality of components. The RACCM also includes a coordinating agent, which is configured to receive processed data from the plurality of intelligent agents.
Claims26
A recipe-and component control module (RACCM), said RACCM being a server for performing data management in a plasma processing system with a plurality of components, said RACCM comprising:
- a plurality of intelligent agents, each intelligent agent of said intelligent agents being configured to interact with each component of said plurality of components;
- aid
- a coordinating agent said coordinating agent being configured to receive processed data from said plurality of intelligent agents.
An article of manufacture comprising a program storage medium having computer readable code embodied therein, said computer readable code being configured to perform data management for a plasma processing system, comprising:
- code for providing a recipe-and component control module (RACCM), said RACCM being a server wherein said RACCM including
- a plurality of intelligent agents, each intelligent agent of said intelligent agents being configured to interact with each component of said plurality of components, and
- a coordinating agent, said coordinating agent being configured to receive processed data from said plurality of intelligent agents.
A computer-implemented method for performing data management, in a plasma processing system, comprising:
- providing a recipe-and component control module (RACCM), said RACCM being a server wherein said RACCM including
- a plurality of intelligent agents, each intelligent agent of said intelligent agents being configured to interact with each component of said plurality of components,
- a coordinating agent, said coordinating agent being configured to receive processed data from said plurality of intelligent agents, and
- a set of provisional agents, said set of provisional agents being configured to perform recipe management, said recipe management including distributing at least part of a recipe to at least one of said plurality of intelligent agents and said coordinating agent.
25 The computer-implemented method of claim 24 wherein said RACCM includes intelligence for performing self-discovery to identity changes to said plasma processing system, said self-discovery including code for identifying when a component of said plurality of components is being connected to said plasma processing system.
Dependencies are inferred from the claim text.