Determining tool set matching using production data

A system for determining matching of a tool set in a production process, the system comprising:

• means for selecting a measurement step within the production process, a subset of tools of the tool set being used in the measurement step;
• means for collecting production data for each tool of the subset, the production data being related to a process feeder tool;
• means for generating a weighted average of the production data for each tool of the subset;
• and
• means for analyzing weighted averages of all tools of the subset using a matching standard to determine matching of the subset.

A computer program product determining matching of a tool set in a production process, comprising:

• computer usable program code which, when executed by a computer system, is configured to:
• select a measurement step within the production process, a subset of tools of the tool set being used in the measurement step;
• collect production data for each tool of the subset, the production data being related to a process feeder tool;
• generate a weighted average of the production data for each tool of the subset;
• and
• analyze weighted averages of all tools of the subset using a matching standard to determine matching of the subset.