# US 2008/0189674 A1 · Data Generating Method, Data Generating Device, and Program

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- Number: US 2008/0189674 A1
- Document ID: US20080189674A1
- Status: Published application
- Kind: A1
- Application number: 11/887,966
- Filed: 2006-04-07
- Published: 2008-08-07
- Earliest claimed: 2005-04-07
- Assignees: Tohoku University; Kumamoto University
- Inventors: Yoshiyuki Taniguchi; Tatsuo Morimoto; Akira Nakada; Masae Nakada; Tadahiro Ohmi
- Web page: https://patentgrep.com/patent/US20080189674A1

## CPC

- G03F 7/70291: {Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices}
- G03F 1/68: Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F 1/78: by charged particle beam [CPB], e.g. electron beam patterning of masks
- G03F 7/70508: {Data handling in all parts of the microlithographic apparatus, e.g. handling pattern data for addressable masks or data transfer to or from different components within the exposure apparatus}
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)

## Abstract

To provide a data generating method, device, and program that can generate drawing data for drawing the entire general design graphic data with an accuracy of about 1 to 4 nm in a drawing method or a drawing system adapted to draw gradation-controllable spotlights in a two-dimensional array. The data generating method is a method for generating, in an exposure system having a function of irradiating multigradation-controllable spotlights in a two-dimensional array onto a photosensitive film on a substrate, gradation values of the spotlights based on design graphic data. Using reference data classified by features of a graphic and describing in advance combinations of gradation values mapped to coordinate information of a graphic, the method discriminates the feature in the design graphic data near positions of the spotlights and selects the combination of the gradation values in the reference data corresponding to coordinate information of the positions of the spotlights, thereby determining the gradation values.

## Claims

### Claim 1

A method of generating, in an exposure system having a function of irradiating multigradation-controllable spotlights in a two-dimensional array onto a photosensitive film on a substrate, gradation values of said spotlights based on design graphic data, said method comprises the steps of:
using reference data classified by features of a graphic and describing in advance combinations of gradation values mapped to coordinate information of a graphic;
discriminating said feature in said design graphic data near positions of said spots; and
selecting the combination of the gradation values in said reference data corresponding to coordinate information of the positions of said spots, thereby determining the gradation values.

### Claim 2 (depends on 1)

The method according to claim 1, wherein the feature of the graphic includes at least one of an area divided by one straight line, an area divided by two parallel straight lines, an area divided by two half lines having the same end point, and an undivided area.

### Claim 3 (depends on 1)

The method according to claim 1, further comprising the steps of:
using, as coordinate information of a graphic, distance information of a center point of the spot from a feature position of the graphic and discrimination information as to whether or not the center point of the spot is present within the graphic; and
determining, based on said distance information and said discrimination information, a feature area of said graphic to which the center point of the spot belongs.

### Claim 4 (depends on 1)

The method according to claim 1, further comprising the step of mapping two spots in an area divided by one straight line.

### Claim 5 (depends on 1)

The method according to claim 1, further comprising the steps of mapping spots located on inner and outer sides of said end point, in an area divided by two half lines having the same end point.

### Claim 6 (depends on 1)

The method according to claim 1, further comprising the step of mapping three spots in an area divided by two parallel straight lines.

### Claim 7 (depends on 1)

The method according to claim 1, further comprising the step of mapping one spot in an undivided area.

### Claim 8

A device for generating data, in an exposure system having a function of irradiating multigradation-controllable spotlights in a two-dimensional array onto a photosensitive film on a substrate, gradation values of said spotlights based on design graphic data, said device comprising gradation value determining means for using reference data classified by features of a graphic and describing in advance combinations of gradation values mapped to coordinate information of a graphic, discriminating said feature in said design graphic data near positions of said spots, and selecting the combination of the gradation values in said reference data corresponding to coordinate information of the positions of said spots, thereby determining the gradation values.

### Claim 9 (depends on 8)

The device according to claim 8, wherein the feature of the graphic includes at least one of an area divided by one straight line, an area divided by two parallel straight lines, an area divided by two half lines having the same end point, and an undivided area.

### Claim 10 (depends on 8)

The device according to claim 8, wherein said gradation value determining means comprises means for using, as coordinate information of a graphic, distance information of a center point of the spot from a feature position of the graphic and discrimination information as to whether or not the center point of the spot is present within the graphic, and determining, based on said distance information and said discrimination information, a feature area of said graphic to which the center point of the spot belongs.

### Claim 11 (depends on 8)

The device according to claim 8, further comprising means for mapping two spots in an area divided by one straight line.

### Claim 12 (depends on 8)

The device according to claim 8, further comprising means for, in an area divided by two half lines having the same end point, mapping spots located on inner and outer sides of said end point.

### Claim 13 (depends on 8)

The device according to claim 8, further comprising means for mapping three spots in an area divided by two parallel straight lines.

### Claim 14 (depends on 8)

A data generating device according to claim 8, further comprising means for mapping one spot in an undivided area.

### Claim 15

A program for generating, in an exposure system having a function of irradiating multigradation-controllable spotlights in a two-dimensional array onto a photosensitive film on a substrate, gradation values of said spotlights based on design graphic data, said program comprising gradation value determining means for using reference data classified by features of a graphic and describing in advance combinations of gradation values mapped to coordinate information of a graphic, discriminating said feature in said design graphic data near positions of said spots, and selecting the combination of the gradation values in said reference data corresponding to coordinate information of the positions of said spots, thereby determining the gradation values.

### Claim 16 (depends on 15)

A program according to claim 15, wherein the feature of the graphic includes at least one of an area divided by one straight line, an area divided by two parallel straight lines, an area divided by two half lines having the same end point, and an undivided area.

### Claim 17 (depends on 15)

A program according to claim 15, wherein said gradation value determining means comprises means for using, as coordinate information of a graphic, distance information of a center point of the spot from a feature position of the graphic and discrimination information as to whether or not the center point of the spot is present within the graphic, and determining, based on said distance information and said discrimination information, a feature area of said graphic to which the center point of the spot belongs.

### Claim 18 (depends on 15)

A program according to claim 15, further comprising means for mapping two spots in an area divided by one straight line.

### Claim 19 (depends on 15)

A program according to claim 15, further comprising means for, in an area divided by two half lines having the same end point, mapping spots located on inner and outer sides of said end point.

### Claim 20 (depends on 15)

A program according to claim 15, further comprising means for mapping three spots in an area divided by two parallel straight lines.

### Claim 21 (depends on 15)

A program according to claim 15, further comprising means for mapping one spot in an undivided area.

### Claim 22

An exposure system for irradiating multigradation-controllable spotlights in a two-dimensional array onto a photosensitive film on a substrate, said exposure system comprising:
data generating means for generating drawing data; and
control means for controlling irradiation positions of said spotlights and exposure of said spotlights based on the drawing data from said data generating means,
wherein said data generating means comprises gradation value determining means for using reference data classified by features of a graphic and describing in advance combinations of gradation values mapped to coordinate information of a graphic, means for discriminating said feature in said design graphic data near positions of said spots, and means for selecting the combination of the gradation values in said reference data corresponding to coordinate information of the positions of said spots thereby determining the gradation values.

### Claim 23 (depends on 22)

The exposure system according to claim 22, wherein the feature of the graphic includes at least one of an area divided by one straight line, an area divided by two parallel straight lines, an area divided by two half lines having the same end point, and an undivided area.

### Claim 24 (depends on 22)

The system according to claim 22, wherein said gradation value determining means comprises means for using, as coordinate information of a graphic, distance information of a center point of the spot from a feature position of the graphic and discrimination information as to whether or not the center point of the spot is present within the graphic, and determining, based on said distance information and said discrimination information, a feature area of said graphic to which the center point of the spot belongs.

### Claim 25 (depends on 22)

The system according to claim 22, wherein the data generating means further comprising means for mapping two spots in an area divided by one straight line.