# US 2008/0188970 A1 · Methods and Arrangement for Creating Recipes Using Best-Known Methods

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- Number: US 2008/0188970 A1
- Document ID: US20080188970A1
- Status: Published application
- Kind: A1
- Application number: 11/536,582
- Filed: 2006-09-28
- Published: 2008-08-07
- Earliest claimed: 2006-09-28
- Assignees: Lam Research Corporation
- Inventors: Chung-Ho Huang; Shih-Jeun Fan; Chin Chuan Chang; Nicolas Bright
- Web page: https://patentgrep.com/patent/US20080188970A1

## CPC

- G06N 5/022: Knowledge engineering; Knowledge acquisition
- G05B 2219/32097: Recipe programming for flexible batch
- G05B 2219/45031: Manufacturing semiconductor wafers
- G06N: COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
- G05B: CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS (systems for controlling or regulating non-electric variables G05D; systems for regulating electric or magnetic variables G05F; control devices or systems insofar as characterised by mechanical features only G05G)

## Abstract

A method for affecting a creation of a recipe for processing a substrate in a processing system is provided. The method includes providing a best-know method driven recipe editor. The best-known method driven recipe editor incorporates best-known methods (BKMs), which are best practice specifications for the recipe. The method also includes creating a plurality of BKM modules based on the BKMs for the recipe. The method further includes defining rules for parameters in the plurality of BKM modules. The rules are propagated by the BKMs. The methods moreover includes creating a BKM driven recipe by employing the best-known method driven recipe editor to enter values for the parameters within the guidelines of BKM rules.

## Claims

### Claim 1

A method for affecting a creation of a recipe for processing a substrate in a processing system, comprising:
providing a best-know method driven recipe editor, said best-known method driven recipe editor incorporating best-known methods (BKMs), said BKMs being best practice specifications for said recipe;
creating a plurality of BKM modules based on said BKMs for said recipe;
defining rules for parameters in said plurality of BKM modules, said rules being propagated by said BKMs;
creating a BKM driven recipe by employing said best-known method driven recipe editor to enter values for said parameters within the guidelines of BKM rules.

### Claim 2 (depends on 1)

The method of claim 1 wherein said plurality of BKM modules includes a first BKM module, said first BKM module including at least one step from said recipe.

### Claim 3 (depends on 2)

The method of claim 2 wherein said plurality BKM modules includes a second BKM module, said second BKM module including at least one step from said recipe, said second BKM module including steps not incorporating into said first BKM module.

### Claim 4 (depends on 1)

The method of claim 1 wherein said rules define permissible values for said parameters.

### Claim 5 (depends on 4)

The method of claim 4 wherein said rules define dependency between said parameters.

### Claim 6 (depends on 4)

The method of claim 4 wherein said rules are automatically updated by said BKMs.

### Claim 7 (depends on 1)

The method of claim 1 wherein said best-known driven recipe editor includes recommended configuration settings for said processing system.

### Claim 8 (depends on 1)

The method of claim 1 wherein said best-known driven recipe editor requests actual configuration settings of said processing system before executing said BKM driven recipe, wherein a comparison between said actual configuration settings and said BKM driven recipe is performed.

### Claim 9 (depends on 8)

The method of claim 8 wherein said best-known method driven recipe editor issues a warning when said comparison indicates incompatibility between said actual configuration settings and said BKM driven recipe.

### Claim 10

An arrangement for affecting a creation of a recipe for processing a substrate in a processing system, comprising:
a best-know method driven recipe editor, said best-known method driven recipe editor incorporating best-known methods (BKMs), said BKMs being best practice specifications for said recipe;
a plurality of BKM modules based on said BKMs for said recipe;
rules for defining parameters in said plurality of BKM modules, said rules being propagated by said BKMs.

### Claim 11 (depends on 10)

The arrangement of claim 10 wherein said plurality of BKM modules includes a first BKM module, said first BKM module including at least one step from said recipe.

### Claim 12 (depends on 11)

The arrangement of claim 11 wherein said plurality BKM modules includes a second BKM module, said second BKM module including at least one step from said recipe, said second BKM module including steps not incorporating into said first BKM module.

### Claim 13 (depends on 10)

The arrangement of claim 10 wherein said rules define permissible values for said parameters.

### Claim 14 (depends on 13)

The arrangement of claim 13 wherein said rules define dependency between said parameters.

### Claim 15 (depends on 13)

The arrangement of claim 13 wherein said rules are automatically updated by said BKMs.

### Claim 16 (depends on 10)

The arrangement of claim 10 wherein said best-known driven recipe editor includes recommended configuration settings for said processing system.

### Claim 17 (depends on 10)

The arrangement of claim 10 wherein said best-known recipe editor is employed to create a BKM driven recipe after receiving value inputs for said parameters.

### Claim 18 (depends on 17)

The arrangement of claim 17 wherein said best-known driven recipe editor requests actual configuration settings of said processing system before executing said BKM driven recipe, wherein a comparison between said actual configuration settings and said BKM driven recipe is performed.

### Claim 19 (depends on 18)

The arrangement of claim 18 wherein said best-known method driven recipe editor issues a warning when said comparison indicates incompatibility between said actual configuration settings and said BKM driven recipe.

### Claim 20

An article of manufacture comprising a program storage medium having computer readable code embodied therein, said computer readable code being configured to create a recipe for processing a substrate in a processing system, comprising:
computer readable code for creating a best-know method driven recipe editor, said best-known method driven recipe editor incorporating best-known methods (BKMs), said BKMs being best practice specifications for said recipe;
computer readable code for creating a plurality of BKM modules based on said BKMs for said recipe;
computer readable code for applying rules in defining parameters in said plurality of BKM modules, said rules being propagated by said BKMs.

### Claim 21 (depends on 20)

The article of manufacture of claim 20 wherein said plurality of BKM modules include a first BKM module, said first BKM module including at least one step from said recipe.

### Claim 22 (depends on 21)

The article of manufacture of claim 21 wherein said plurality BKM modules include a second BKM module, said second BKM module including at least one step from said recipe, said second BKM module including steps not incorporating into said first BKM module.

### Claim 23 (depends on 20)

The article of manufacture of claim 20 wherein said rules define permissible values for said parameters.

### Claim 24 (depends on 23)

The article of manufacture of claim 23 wherein said rules define dependency between said parameters.

### Claim 25 (depends on 20)

The article of manufacture of claim 20 wherein said rules are automatically updated by said BKMs.

### Claim 26 (depends on 20)

The article of manufacture of claim 20 wherein said best-known driven recipe editor includes recommended configuration settings for said processing system.

### Claim 27 (depends on 20)

The article of manufacture of claim 20 wherein said best-known recipe editor is employed to create a BKM driven recipe after receiving value inputs for said parameters.

### Claim 28 (depends on 20)

The article of manufacture of claim 20 wherein said best-known driven recipe editor requests actual configuration settings of said processing system before executing said BKM driven recipe, wherein a comparison between said actual configuration settings and said BKM driven recipe is performed.

### Claim 29 (depends on 27)

The article of manufacture of claim 27 wherein said best-known method driven recipe editor issues a warning when said comparison indicates incompatibility between said actual configuration settings and said BKM driven recipe.