# US 2008/0187660 A1 · Method and device for the localized application of parting means

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- Number: US 2008/0187660 A1
- Document ID: US20080187660A1
- Status: Published application
- Kind: A1
- Application number: 12/074,005
- Filed: 2008-02-29
- Published: 2008-08-07
- Earliest claimed: 2003-07-04
- Inventors: Stefan Hein
- Web page: https://patentgrep.com/patent/US20080187660A1

## CPC

- H01G 13/00: Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00
- C23C 14/042: {using masks}
- H01G: CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE (selection of specified materials as dielectric H01B3/00; capacitors having potential barriers H10D1/62, H10K10/10)
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)

## Abstract

A method for locally applying onto a moving substrate in a vacuum chamber a parting means preventing coating using a heatable vaporizer.

## Claims

### Claim at position 1

1-27. (canceled)

### Claim 28

A method comprising locally applying with a device for the localized application of a parting means preventing coating by means of a heatable vaporizer onto moving substrates in a vacuum chamber, which comprises at least one metal vaporizer, the parting means vaporizer comprising a first chamber with at least one heating body for the vaporization of the parting means as well as a second chamber extending parallel to the first chamber and connected with it, and comprising at least one nozzle directed onto the particular substrate, and with at least one setting valve for blocking the parting means supply, wherein
a) the at least one setting valve is a proportional valve, which is disposed between the first chamber and the second chamber,
b) the setting valve is disposed in one channel of the parting means vaporizer, which channel connects the first chamber with the second chamber, and
c) the setting valve is implemented such that the vapor stream of parting means is specifically adjustable in terms of quantity as well as is also completely interruptible, wherein a parting means preventing coating by heating parting means in the first chamber to vaporize the parting means and transferring the vaporized parting means into the second chamber via the at least one setting valve, by
a) keeping a vaporizer temperature in the vaporizer constant as much as possible,
b) supplying the vapor from the first chamber via the at least one setting valve under control into the second chamber and in the second chamber initially parallel to the first chamber to the at least one nozzle, and
c) closing the setting valve keeping it closed in the event the substrate stands still or is absent.

### Claim 29 (depends on 28)

The method as claimed in claim 28, wherein the liquid parting means contained in the first chamber is kept at constant temperature through at least one electric immersed heating body, and that at least the wall of the second chamber, and therewith the at least one nozzle, is also kept at constant temperature through at least one further electric heating body, which is chosen to be above the boiling temperature of the parting means.

### Claim 30 (depends on 29)

The method as claimed in claim 29, wherein the first chamber is disposed beneath and the second chamber in a higher position, and the vaporous parting means is directed with a perpendicular direction component from below against a band-form substrate.

### Claim 31 (depends on 28)

The method as claimed in claim 28, wherein the first chamber is disposed above and the second chamber in a lower position, and the vaporous parting means is directed with a perpendicular direction component from above against a plate-form substrate.

### Claim 32 (depends on 28)

The method as claimed in claim 28, wherein the wall temperature of the second chamber is adjusted to a higher value than the parting means temperature in the first chamber.

### Claim 33 (depends on 28)

The method as claimed in claim 28, wherein the heating power of the immersed heating body is adjusted as a function of the parting means temperature.

### Claim 34 (depends on 28)

The method as claimed in claim 28, wherein the heating power of the immersed heating body for the at least one nozzle is adjusted as a function of the nozzle temperature.

### Claim 35 (depends on 28)

The method as claimed in claim 28, wherein the vapor quantity streaming from the first chamber over into the second chamber per unit time is adjusted through the at least one proportional setting valve as a function of the parting means requirement for the at least one nozzle.

### Claim 36 (depends on 28)

The method as claimed in claim 28, wherein the vapor quantity of parting means emerging from the at least one nozzle per unit time is adjusted as a function of the layer thickness and the width of an oil tracking as well as the transporting rate of the substrate.

### Claim 37 (depends on 28)

The method as claimed in claim 28, wherein the layer thickness of an oil tracing is adjusted proportionally to the metal quantity vaporized by the metal vaporizer per unit time.

### Claim 38 (depends on 28)

The method as claimed in claim 28, wherein the at least one oil tracing is passed through an observation field in which a visual check of an oil tracing is carried out.

### Claim 39 (depends on 28)

The method as claimed in claim 28, wherein the operating parameters critical for the implementation of the distribution pattern and of the necessary thickness of an oil tracing are supplied to a control system, in which they are converted into setting variables for the control and/or regulation of the vaporizer for the parting means.

### Claim 40 (depends on 28)

The method as claimed in claim 28, wherein the operating parameters critical for the implementation of the metal coating are also supplied to the control system in which they are converted into setting variables for the control and/or regulation of the metal vaporizer.

### Claim 41

A method for the localized application of a parting means preventing coating with a vaporizer onto moving substrates in a vacuum chamber, comprising at least one metal vaporizer, the parting means vaporizing in a first chamber by heating and in vaporous form transferred via at least one setting valve into a second chamber provided with at least one nozzle directed onto the particular substrate, wherein
a) the vaporizer temperature is kept as much as possible constant,
b) the vapor from the first chamber is supplied via the at least one setting valve under control into the second chamber and in the latter initially parallel to the first chamber to the at least one nozzle and that
c) the setting valve is closed and kept closed in the event the substrate stands still or is absent.

### Claim 42 (depends on 41)

The method as claimed in claim 41, wherein the liquid parting means contained in the first chamber is kept at constant temperature through at least one electric immersed heating body, and that at least the wall of the second chamber, and therewith the at least one nozzle, is also kept at constant temperature through at least one further electric heating body, which is chosen to be above the boiling temperature of the parting means.

### Claim 43 (depends on 42)

The method as claimed in claim 42, wherein the first chamber is disposed beneath and the second chamber in a higher position, and the vaporous parting means is directed with a perpendicular direction component from below against a band-form substrate.

### Claim 44 (depends on 42)

The method as claimed in claim 42, wherein the first chamber is disposed above and the second chamber in a lower position, and the vaporous parting means is directed with a perpendicular direction component from above against a plate-form substrate.

### Claim 45 (depends on 41)

The method as claimed in claim 41, wherein the wall temperature of the second chamber is adjusted to a higher value than the parting means temperature in the first chamber.

### Claim 46 (depends on 41)

The method as claimed in claim 41, wherein the heating power of the immersed heating body is adjusted as a function of the parting means temperature.

### Claim 47 (depends on 41)

The method as claimed in claim 41, wherein the heating power of the immersed heating body for the at least one nozzle is adjusted as a function of the nozzle temperature.

### Claim 48 (depends on 41)

The method as claimed in claim 41, wherein the vapor quantity streaming from the first chamber over into the second chamber per unit time is adjusted through the at least one proportional setting valve as a function of the parting means requirement for the at least one nozzle.

### Claim 49 (depends on 41)

The method as claimed in claim 41, wherein the vapor quantity of parting means emerging from the at least one nozzle per unit time is adjusted as a function of the layer thickness and the width of an oil tracking as well as the transporting rate of the substrate.

### Claim 50 (depends on 41)

The method as claimed in claim 41, wherein the layer thickness of an oil tracing is adjusted proportionally to the metal quantity vaporized by the metal vaporizer per unit time.

### Claim 51 (depends on 41)

The method as claimed in claim 41, wherein the at least one oil tracing is passed through an observation field in which a visual check of an oil tracing is carried out.

### Claim 52 (depends on 41)

The method as claimed in claim 41, wherein the operating parameters critical for the implementation of the distribution pattern and of the necessary thickness of an oil tracing are supplied to a control system, in which they are converted into setting variables for the control and/or regulation of the vaporizer for the parting means.

### Claim 53 (depends on 41)

The method as claimed in claim 41, wherein the operating parameters critical for the implementation of the metal coating are also supplied to the control system in which they are converted into setting variables for the control and/or regulation of the metal vaporizer.