# US 2008/0187420 A1 · Mounting device

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- Number: US 2008/0187420 A1
- Document ID: US20080187420A1
- Status: Published application
- Kind: A1
- Application number: 12/024,556
- Filed: 2008-02-01
- Published: 2008-08-07
- Earliest claimed: 2007-02-02
- Assignees: Tokyo Electron Limited
- Inventors: Hiroshi SHIMOYAMA; Kazuya Yano; Masaru Suzuki
- Web page: https://patentgrep.com/patent/US20080187420A1

## CPC

- G01R 31/2887: {involving moving the probe head or the IC under test; docking stations (moving single probes G01R1/06705; moving individual probes in multiple probes G01R1/07392)}
- H10P 72/57: {Mask-wafer alignment}
- Y10S 269/90: Supporting structure having work holder receiving apertures or projections
- G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12)
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- Y10S: TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

## Abstract

A mounting device provided on a horizontally movable stage mechanism, includes a mounting table for mounting thereon a target object, a cylindrical elevation body, having a diameter smaller than a diameter of the mounting table, for supporting the mounting table, a plurality of elevation guide rails provided on an outer peripheral surface of the elevation body so as to be spaced from each other at substantially regular intervals in a circumferential direction, and a plurality of support members each having a vertical plate to which engaging bodies engaged with the elevation guide rails are fixed. Further, a plurality of reinforcing parts are vertically provided on the outer peripheral surface of the elevation body so as to be spaced from each other at substantially regular intervals in the circumferential direction.

## Claims

### Claim 1

A mounting device provided on a horizontally movable stage mechanism, comprising:
a mounting table for mounting thereon a target object;
a cylindrical elevation body, having a diameter smaller than a diameter of the mounting table, for supporting the mounting table;
a plurality of elevation guide rails provided on an outer peripheral surface of the elevation body so as to be spaced from each other at substantially regular intervals in a circumferential direction; and
a plurality of support members each having a vertical plate to which engaging bodies engaged with the elevation guide rails are fixed.

### Claim 2 (depends on 1)

The mounting device of claim 1, wherein a plurality of reinforcing parts are vertically provided on the outer peripheral surface of the elevation body so as to be spaced from each other at substantially regular intervals in the circumferential direction.

### Claim 3 (depends on 2)

The mounting device of claim 2, wherein the reinforcing parts are alternately disposed between the elevation guide rails.

### Claim 4 (depends on 2)

The mounting device of claim 2, wherein protrusions supporting the mounting table are provided at upper portions of the reinforcing parts.

### Claim 5 (depends on 2)

The mounting device of claim 2, wherein the elevation guide rails and the reinforcing parts are provided at three locations on the outer peripheral surface of the elevation body, respectively.