# US 2008/0187211 A1 · Global matching methods used to fabricate semiconductor devices

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- Number: US 2008/0187211 A1
- Document ID: US20080187211A1
- Status: Published application
- Kind: A1
- Application number: 11/880,495
- Filed: 2007-07-23
- Published: 2008-08-07
- Earliest claimed: 2006-10-26
- Assignees: Samsung Electronics Co., Ltd.
- Inventors: Chan-Kyeong Hyon; Young-Seog Kang; Sang-Ho Lee
- Web page: https://patentgrep.com/patent/US20080187211A1

## CPC

- G06T 7/001: {using an image reference approach}
- G06T 7/13: Edge detection
- G06V 10/75: Organisation of the matching processes, e.g. simultaneous or sequential comparisons of image or video features; Coarse-fine approaches, e.g. multi-scale approaches; using context analysis; Selection of dictionaries
- G06T 2207/10056: Microscopic image
- G06T 2207/30148: Semiconductor; IC; Wafer
- G06T: IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06V: IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING

## Abstract

A global matching method for semiconductor memory device fabrication may include extracting a graphic data system (GDS) image and a scanning electron microscope (SEM) image of patterns in a region on a wafer. First directional edges extending in a first direction and second directional edges extending in a second direction may be separately extracted from each of the GDS image and the SEM image with the first and second directions being different. The GDS image and the SEM image may be matched with respect to either the first directional edges or the second directional edges which are relatively shorter. After the relatively shorter edges of the GDS image and the SEM image are matched, the GDS image and the SEM image may be matched with respect to relatively longer edges, based on a result of the matching with respect to the relatively shorter edges, thereby completing pattern matching of the GDS image and the SEM image.

## Claims

### Claim 1

A global matching method for semiconductor memory device fabrication, the method comprising:
extracting a graphic data system (GDS) image and a scanning electron microscope (SEM) image of patterns in a region on a wafer;
separately extracting first directional edges, which extend in a first direction, and second directional edges, which extend in a second direction different from the first direction and are relatively longer than the first directional edges, from each of the GDS image and the SEM image;
matching the first directional edges of the GDS image and the first directional edges of the SEM image; and
based on a result of the matching of the first directional edges, matching the second directional edges of the GDS image and the second directional edges of the SEM image, thereby completing pattern matching between the GDS image and the SEM image.

### Claim 2 (depends on 1)

The global matching method according to claim 1, wherein separately extracting the first and second directional edges from the SEM image comprises:
detecting edges of the patterns in the SEM image;
squaring rounded portions of the edges to provide a straightened SEM image; and
separately extracting the first and second directional edges from the straightened SEM image.

### Claim 3

A global matching method for semiconductor memory device fabrication, the method comprising:
extracting a graphic data system (GDS) image and a scanning electron microscope (SEM) image of patterns in a region on a wafer;
separately extracting first directional edges, which extend in a first direction, and second directional edges, which extend in a second direction different from the first direction, from each of the GDS image and the SEM image;
matching the first directional edges of the GDS image and the first directional edges of the SEM image; and
based on a result of the matching of the first directional edges, matching the second directional edges of the GDS image and the second directional edges of the SEM image, thereby completing pattern matching between the GDS image and the SEM image.

### Claim 4 (depends on 3)

The global matching method according to claim 3, wherein separately extracting the first and second directional edges from the SEM image comprises:
detecting edges of the patterns in the SEM image;
squaring rounded portions of the edges to provide a straightened SEM image; and
separately extracting the first and second directional edges from the straightened SEM image.

### Claim 5

A global matching method for semiconductor memory device fabrication, the method comprising:
extracting a graphic data system (GDS) image of patterns in a region on a wafer;
separately extracting first directional edges, which extend in a first direction, and second directional edges, which extend in a second direction different from the first direction, from the GDS image;
acquiring a scanning electron microscope (SEM) image of the pattern;
separately extracting first directional edges, which extend in the first direction, and second directional edges, which extend in the second direction and are longer than the first directional edges, from the SEM image;
matching the first directional edges of the GDS image and the first directional edges of the SEM image; and
based on a result of the matching of the first directional edges, matching the second directional edges of the GDS image and the second directional edges of the SEM image, thereby completing pattern matching between the GDS image and the SEM image.

### Claim 6 (depends on 5)

The global matching method according to claim 5, wherein separately extracting the first and second directional edges from the SEM image comprises:
detecting edges of the patterns in the SEM image;
squaring rounded portions of the edges to provide a straightened SEM image; and
separately extracting the first and second directional edges from the straightened SEM image.

### Claim 7

A global matching method for semiconductor memory device fabrication, the method comprising:
extracting a GDS image of patterns in a predetermined region on a wafer;
separately extracting first directional edges, which extend in a first direction, and second directional edges, which extend in a second direction different from the first direction, from the GDS image;
measuring a scanning electron microscope (SEM) image of the pattern;
separately extracting first directional edges, which extend in the first direction, and second directional edges, which extend in the second direction, from the SEM image;
matching the first directional edges of the GDS image and the first directional edges of the SEM image; and
based on a result of the matching of the first directional edges, matching the second directional edges of the GDS image and the second directional edges of the SEM image, thereby completing pattern matching between the GDS image and the SEM image.

### Claim 8 (depends on 7)

The global matching method according to claim 7, wherein separately extracting the first and second directional edges from the SEM image comprises:
defining edges of the patterns in the SEM image;
squaring rounded portions of the edges to provide a straightened SEM image; and
separately extracting the first and second directional edges from the straightened SEM image.