# US 2008/0186464 A1 · Processing apparatus and device manufacturing method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2008/0186464 A1 - Document ID: US20080186464A1 - Status: Published application - Kind: A1 - Application number: 12/025,940 - Filed: 2008-02-05 - Published: 2008-08-07 - Earliest claimed: 2007-02-07 - Assignees: Canon Kabushiki Kaisha - Inventors: Shinichi Hirano - Web page: https://patentgrep.com/patent/US20080186464A1 ## CPC - H10P 72/0612: {Production flow monitoring, e.g. for increasing throughput} - G03F 7/70525: {Controlling normal operating mode, e.g. matching different apparatus, remote control or prediction of failure} - G03F 7/7075: {Handling workpieces outside exposure position, e.g. SMIF box} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) ## Abstract A processing apparatus including a processing unit configured to process an object includes a conveying unit configured to convey an object between a transfer portion provided between an external apparatus and the processing unit, and the processing unit, a controller configured to output a request signal requesting the external apparatus to convey the object to the transfer portion, and an output unit configured to output a signal indicating a start of maintenance of the processing apparatus. The controller is configured to output to the external apparatus a signal for stopping the conveyance of the object to the transfer portion, based on the signal indicating the start of maintenance output from the output unit, after outputting the request signal. ## Claims ### Claim 1 A processing apparatus including a processing unit configured to process an object, the apparatus comprising: a conveying unit configured to convey the object between a transfer portion provided between an external apparatus and the processing unit, and the processing unit; a controller configured to output a request signal requesting the external apparatus to convey the object to the transfer portion; and an output unit configured to output a signal indicating a start of maintenance of the processing apparatus; wherein the controller is configured to output to the external apparatus a signal for stopping the conveyance of the object to the transfer portion, based on the signal indicating the start of maintenance output from the output unit, after outputting the request signal. ### Claim 2 (depends on 1) An apparatus according to claim 1, further comprising a door for the maintenance, wherein the output unit includes a detection unit configured to detect an open state of the door. ### Claim 3 (depends on 1) An apparatus according to claim 1, wherein the controller is configured to output a signal for turning off a drive power of a conveying unit that conveys the object in the external apparatus, as the signal for stopping the conveyance of the object. ### Claim 4 (depends on 1) An apparatus according to claim 1, wherein the controller is configured to output the signal for stopping the conveyance of the object to one of a power supply unit of the external apparatus, which supplies power to a conveying unit in the external apparatus that conveys the object, and a controller of the external apparatus. ### Claim 5 A processing apparatus including a processing unit configured to process an object, the apparatus comprising: a conveying unit configured to convey the object between a transfer portion provided between an external apparatus and the processing unit, and the processing unit; a controller configured to output a request signal requesting the external apparatus to convey the object to the transfer portion; an output unit configured to output a signal indicating a start of maintenance of the processing apparatus; and a shutter configured to isolate, in the transfer portion, an approach area of a conveying unit of the external apparatus that conveys the object; wherein the controller controls and closes the shutter based on the signal indicating the start of maintenance output from the output unit, after outputting the request signal. ### Claim 6 (depends on 5) An apparatus according to claim 5, further comprising a door used for the maintenance, wherein the output unit includes a detection unit configured to detect an open state of the door. ### Claim 7 (depends on 5) An apparatus according to claim 5, wherein the processing apparatus is a device manufacturing apparatus. ### Claim 8 (depends on 7) An apparatus according to claim 7, wherein the processing apparatus is an exposure apparatus, and the external apparatus is a photosensitive material coating and developing apparatus. ### Claim 9 (depends on 7) An apparatus according to claim 7, wherein the processing apparatus is a photosensitive material coating and developing apparatus, and the external apparatus is an exposure apparatus. ### Claim 10 A method of manufacturing a device utilizing a processing apparatus including a processing unit configured to process an object; a conveying unit configured to convey the object between a transfer portion provided between an external apparatus and the processing unit, and the processing unit; a controller configured to output a request signal requesting the external apparatus to convey the object to the transfer portion; an output unit configured to output a signal indicating a start of maintenance of the processing apparatus; and a shutter configured to isolate, in the transfer portion, an approach area of a conveying unit of the external apparatus that conveys the object, wherein the controller controls and closes the shutter based on the signal indicating the start of maintenance output from the output unit, after outputting the request signal, wherein the processing apparatus is a device manufacturing apparatus, wherein the processing apparatus is an exposure apparatus, and the external apparatus is a photosensitive material coating and developing apparatus; the method comprising: exposing a substrate to radiant energy using the processing apparatus; developing the exposed substrate; and processing the developed substrate to manufacture the device. ### Claim 11 A method of manufacturing a device utilizing a processing apparatus including a processing unit configured to process an object; a conveying unit configured to convey the object between a transfer portion provided between an external apparatus and the processing unit, and the processing unit; a controller configured to output a request signal requesting the external apparatus to convey the object to the transfer portion; an output unit configured to output a signal indicating a start of maintenance of the processing apparatus; and a shutter configured to isolate, in the transfer portion, an approach area of a conveying unit of the external apparatus that conveys the object, wherein the controller controls and closes the shutter based on the signal indicating the start of maintenance output from the output unit, after outputting the request signal, wherein the processing apparatus is a device manufacturing apparatus, wherein the processing apparatus is a photosensitive material coating and developing apparatus, and the external apparatus is an exposure apparatus; the method comprising: exposing a substrate to radiant energy; developing the exposed substrate using the processing apparatus; and processing the developed substrate to manufacture the device. ### Claim 12 A method of manufacturing a device utilizing a processing apparatus including a processing unit configured to process an object; a conveying unit configured to convey the object between a transfer portion provided between an external apparatus and the processing unit, and the processing unit; a controller configured to output a request signal requesting the external apparatus to convey the object to the transfer portion; an output unit configured to output a signal indicating a start of maintenance of the processing apparatus; and a shutter configured to isolate, in the transfer portion, an approach area of a conveying unit of the external apparatus that conveys the object, wherein the controller controls and closes the shutter based on the signal indicating the start of maintenance output from the output unit, after outputting the request signal, wherein the processing apparatus is a device manufacturing apparatus, wherein the processing apparatus is a photosensitive material coating and developing apparatus, and the external apparatus is an exposure apparatus; the method comprising: coating a substrate with photosensitive material using the processing apparatus; exposing the coated substrate to radiant energy; and processing the exposed substrate to manufacture the device.