# US 2008/0186438 A1 · Method and apparatus for alignment film, alignment film, and liquid crystal device

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- Number: US 2008/0186438 A1
- Document ID: US20080186438A1
- Status: Published application
- Kind: A1
- Application number: 12/026,085
- Filed: 2008-02-05
- Published: 2008-08-07
- Earliest claimed: 2007-02-07
- Assignees: Canon Kabushiki Kaisha
- Inventors: Akira Sakai; Toshiaki Aiba; Yohei Ishida
- Web page: https://patentgrep.com/patent/US20080186438A1

## CPC

- G02F 1/133734: {by obliquely evaporated films, e.g. Si or SiO2 films}
- G02F 1/1303: {Apparatus specially adapted to the manufacture of LCDs}
- G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS

## Abstract

A first film is formed on a substrate by oblique deposition and thereafter a second film is formed on the first film by sputtering.

## Claims

### Claim 1

A method for forming an alignment film of a liquid crystal, comprising:
a step of forming a first film on a substrate by an oblique deposition method; and
a step of forming a second film on the first film by a sputtering method.

### Claim 2 (depends on 1)

A method according to claim 1, wherein the oblique deposition method comprises steps of evaporating a material by heating a source of the material and depositing the evaporated material obliquely onto the substrate.

### Claim 3 (depends on 1)

A method according to claim 1, wherein the second film is formed at a room temperature.

### Claim 4 (depends on 1)

A method according to claim 1, wherein the second film is formed by an oblique sputtering method.

### Claim 5 (depends on 1)

A method according to claim 1, wherein the second film is formed in a rare gas atmosphere.

### Claim 6 (depends on 1)

A method according to claim 1, wherein the rare gas atmosphere comprises Ar.

### Claim 7

A film forming apparatus for forming an alignment film of a liquid crystal, comprising:
first means for evaporating a first material by heating a source of the first material;
second means for evaporating a second material by sputtering a target of the second material; and
a stage for mounting a substrate to obliquely deposit the first material evaporated by the first means and to deposit the second material evaporated by the second means onto the first material.

### Claim 8

An alignment film of a liquid crystal comprising:
a first film formed on a substrate by an oblique deposition method; and
a second film formed on said first film by a sputtering method.

### Claim 9

A liquid crystal device comprising:
a pair of substrates;
an alignment film formed on an inner surface of each of said pair of substrates; and
a liquid crystal disposed between said pair of substrates,
wherein said alignment film comprises a first film formed by an oblique deposition method and a second film formed on the first film by a sputtering method.