# US 2008/0184505 A1 · Probe tip cleaning apparatus and method of use > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2008/0184505 A1 - Document ID: US20080184505A1 - Status: Published application - Kind: A1 - Application number: 11/306,720 - Filed: 2006-01-09 - Published: 2008-08-07 - Earliest claimed: 2006-01-09 - Assignees: International Business Machines Corporation - Inventors: Ronald A. Feroli - Web page: https://patentgrep.com/patent/US20080184505A1 ## CPC - A46B 13/00: Brushes with driven brush bodies {or carriers}(power-driven toothbrushes A61C17/16) - B08B 1/10: characterised by the type of cleaning tool - B08B 1/12: Brushes - B08B 15/04: from a small area, e.g. a tool {(removing chips B23Q11/0042)} - G01R 3/00: Apparatus or processes specially adapted for the manufacture {or maintenance} of measuring instruments {, e.g. of probe tips} - A46B: BRUSHES (handles not integral with brushware B25G) - B08B: CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL - G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12) ## Abstract Apparatus for the method, including cartridges for housing strips of cleaning pad material, are provided. A method for cleaning probe tips, e.g., on a probe card, comprises abrading the probe tips on an abrasive surface, and advancing the abrasive surface so that a later cleaning cycle uses a clean portion of the cleaning pad. The method may include use of a vacuum to aspirate material dislodged by the abrading. In another aspect, a method for cleaning probe tips includes brushing the probe tips and operating a vacuum to aspirate material from the probe tips and/or brush. The methods may be used singly or in combination. ## Claims ### Claim 1 A cartridge comprising a cleaning pad, a cleaning pad supply portion, and a cleaning pad take-up portion, the cartridge being designed and configured to fit into a cleaning portion of a wafer prober. ### Claim 2 (depends on 1) The cartridge of claim 1, further comprising a window positioned between the cleaning pad supply portion and cleaning pad take-up portion, the window being positioned and arranged to permit access to a portion of a cleaning surface of the cleaning pad. ### Claim 3 (depends on 1) The cartridge of claim 1, further comprising a brush positioned and adapted to brush a probe tip of the wafer prober. ### Claim 4 (depends on 3) The method of claim 3, further comprising a brush vacuum positioned and adapted to aspirate material from the brush. ### Claim 5 (depends on 1) The cartridge of claim 1, further comprising a tensioner structured to place tension on the cleaning pad. ### Claim 6 (depends on 5) The cartridge of claim 5, wherein the tensioner is one of a pinch roller and opposing arms. ### Claim 7 (depends on 1) The cartridge of claim 1, further comprising a scrubber vacuum positioned and arranged to aspirate material on the contact pad. ### Claim 8 (depends on 1) The cartridge of claim 1, further comprising a backing surface positioned such that a portion of the cleaning pad is between the window and the backing surface, wherein the backing surface is substantially planar and is provided with a plurality of openings. ### Claim 9 (depends on 8) The cartridge of claim 8, wherein at least one of the cleaning pad supply portion and the cleaning pad take-up portion is a rotatable spindle. ### Claim 10 (depends on 1) The cartridge of claim 1, further comprising a vacuum for drawing the cleaning pad toward a backing surface. ### Claim 11 A probe cleaning apparatus comprising: a cleaning pad supply portion and a cleaning pad take-up portion; a cleaning pad wound at least on the cleaning pad supply portion and dispensed in the cleaning pad take-up portion during use; a scrubber vacuum positioned and arranged to aspirate material dislodged by the cleaning pad; and a backing surface having at least a portion adjacent to the cleaning pad. ### Claim 12 (depends on 11) The probe cleaning apparatus of claim 11, further comprising a brush, the brush adapted and configured to brush a probe tip of a probe test apparatus, and a brush vacuum positioned and arranged to aspirate material from the brush. ### Claim 13 (depends on 11) The probe cleaning apparatus of claim 11, further comprising a tensioner structured to place tension on the cleaning pad. ### Claim 14 (depends on 11) The probe cleaning apparatus of claim 11, further comprising a window positioned between the cleaning pad supply portion and the cleaning pad take-up portion to provide access to the cleaning pad. ### Claim 15 (depends on 11) The probe cleaning apparatus of claim 11, wherein the backing surface is substantially planar. ### Claim 16 (depends on 15) The probe cleaning apparatus of claim 15, wherein the backing surface is provided with a plurality of openings, the apparatus further comprising a backing surface vacuum for drawing the cleaning pad toward the backing surface. ### Claim 17 A method of cleaning a probe tip comprising contacting a probe tip with a surface of a cleaning pad, abrading the probe tip with the cleaning pad, and advancing the cleaning pad in a direction parallel to the surface of the cleaning pad. ### Claim 18 (depends on 17) The method of claim 17, further comprising operating a scrubber vacuum positioned and arranged to aspirate material dislodged by the abrading. ### Claim 19 (depends on 17) The method of claim 17, further comprising operating a backing surface vacuum for drawing the cleaning pad toward the backing surface. ### Claim 20 (depends on 17) The method of claim 17, further comprising contacting the probe tip with a brush to dislodge, and vacuuming material from the brush.