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US 2008/0179765 A1Published application
Humidifying apparatus, lithographic apparatus and humidifying method
AssigneeASML Netherland B.V.
InventorAntonius Johannus Van Der Net
Life of this patent
Estimating the term…
Abstract
A humidifying apparatus is disclosed in which gas is provided to a first side of a membrane and liquid to a second side of the same membrane. The membrane is non-porous to the liquid but porous to vapour of the liquid and is liquidphilic to said liquid.
Claims30
A humidifying apparatus comprising:
- a membrane;
- a first conduit configured to guide gas to one side of said membrane;
- a second conduit configured to guide liquid to the other side of said membrane;
- wherein said membrane has a surface which is liquidphilic to said liquid, and, in use, behaves in a non-porous manner with regard to said liquid and in a porous manner with regard to the vapour of said liquid.
1 more element
(canceled)
A humidifying apparatus comprising:
- a membrane;
- a liquid temperature conditioner for conditioning the temperature of a liquid;
- a liquid conduit for guiding liquid from said liquid temperature conditioner to one side of said membrane;
- and
- a gas conduit for guiding gas to the other side of said membrane;
- wherein the temperature of said gas on the other side of said membrane is influenced by the temperature of liquid on the one side of said membrane.
3 more elements
A method of humidifying gas comprising:
- providing a liquid on one side of a membrane which membrane is liquidphilic to said liquid, and, in use, behaves in a non-porous manner with regard to said liquid and in a porous manner with regard to the vapour of said liquid;
- and
- providing a gas to be humidified on the other side of said membrane.
A method of humidifying gas comprising:
- controlling the temperature of a liquid and providing that liquid to one side of a membrane;
- and
- providing gas to be humidified to the other side of said membrane,
- wherein the temperature of gas on the other side of said membrane is influenced by the temperature of liquid on the one side of the membrane.
1 more element
Dependencies are inferred from the claim text.