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US 2008/0178142 A1Published application
Hotspot detection method for design and validation of layout for semiconductor device
AssigneeElpida Memory, Inc.
InventorYorio Takada
Life of this patent
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Abstract
A hotspot detection method for detecting a hotspot in a layout for a semiconductor device, includes: dividing a target analysis area into a grid based on layout data about the semiconductor device; and determining whether the grid falls into a hotspot or not, based on the results from simulation, using at least a detection criterion concerning a direction perpendicular to a direction of film thickness.
Claims8
A hotspot detection method for detecting a hotspot in a layout for a semiconductor device, comprising:
- dividing a target analysis area into a grid based on layout data about the semiconductor device;
- and
- determining whether the grid falls into a hotspot or not, based on the results from simulation, using at least a detection criterion concerning a direction perpendicular to a direction of film thickness.
A hotspot detection method for detecting a hotspot in a layout for a semiconductor device, comprising:
- detecting the hotspot using, in addition to a first detection criterion concerning a direction of film thickness, a second detection criterion concerning a direction perpendicular to the direction of film thickness.
Dependencies are inferred from the claim text.