Testing method and method for manufacturing an electronic device
AssigneeKabushiki Kaisha Toshiba
InventorsRyuuichi Teramoto, Seiji Onoue
Life of this patent
Estimating the term…
Abstract
A testing method includes: storing QC data for each of electronic device manufacturing processes in a storage unit; changing the QC data for each of the processes to a common fixed form of data; providing a contour for the QC data for each of the processes using the common fixed form of data; comparing a singularity map to a failure generation map for a completed device; and finding a causal process for a failure and a defect through the comparison.
Claims18
A testing method comprising:
- storing QC data for each process of electronic device manufacturing processes in a storage unit;
- providing a distribution map for the QC data for each of the processes;
- finding a singularity in the distribution map and making a singularity map;
- comparing the singularity map to a failure generation map for a completed electronic device;
- and
- determining a causal process for a failure and a defect through the comparison.
A method of manufacturing an electronic device comprising:
- proceeding each processes for manufacturing an electronic device;
- storing QC data for each process of electronic device manufacturing processes in a storage unit;
- providing a distribution map for the QC data for each of the processes;
- finding a singularity in the distribution map and making a singularity map;
- comparing the singularity map to a failure generation map for a completed electronic device;
- and
- finding a causal process for a failure and a defect through the comparison.
The method according to claim 6, further comprising:
- adjusting a manufacturing conditions for the causal process for the failure.
A testing system comprising:
- a data storing device storing QC data for each process of electronic device manufacturing processes in a storage unit;
- a data-changing-storage unit changing the QC data for each of the processes to a common fixed form of data,
- a distribution-map providing unit providing a distribution map for the QC data for each of the processes by using the common fixed form of data;
- a singularity-map-making unit for finding a singularity in the distribution map and making a singularity map;
- a calculation unit comparing the singularity map to a failure generation map for a completed electronic device;
- finding a causal process for a failure and a defect through the comparison;
- and,
- a display unit displaying the GC distribution-map, the singularity-map, and the causal process.
A computer program product stored on a computer readable medium and configured to operate an electronic device testing system comprising:
- instructions configured to store QC data for each process of electronic device manufacturing processes in a storage unit;
- instructions configured to provide a distribution map for the QC data for each of the processes;
- instructions configured to find a singularity in the distribution map and make a singularity map;
- instructions configured to compare the singularity map to a failure generation map for a completed electronic device;
- and
- instructions configured to find a causal process for a failure and a defect through the comparison.
Dependencies are inferred from the claim text.