Method, system and medium for controlling manufacturing process using adaptive models based on empirical data

A computer-assisted system configured to generate parameters for a manufacturing apparatus to produce wafers, comprising:

• means for identifying one or more input parameters that cause a change in output characteristics of the wafers produced by the manufacturing apparatus;
• means for estimating the output characteristics of the wafers based on changes to the input parameters;
• means for minimizing a first mathematical function to yield optimized output values;
• and
• means for generating a recipe for controlling the manufacturing apparatus for producing the wafers based on the optimized output values.

A computer readable medium comprising executable instructions which when executed on a processing system cause said processing system to generate parameters for a manufacturing apparatus to produce wafers, the method comprising:

• identifying one or more input parameters that cause a change in output characteristics of the wafers produced by the manufacturing apparatus;
• estimating the output characteristics of the wafers based on changes to the input parameters;
• minimizing a first mathematical function to yield optimized output values;
• and
• generating a recipe for controlling the manufacturing apparatus for producing the wafers based on the optimized output values.

A computer implemented method for generating parameters for a manufacturing apparatus to produce wafers, the method comprising:

• identifying one or more input parameters that cause a change in output characteristics of the wafers produced by the manufacturing apparatus;
• predicting an output value for a set of values of the input parameters;
• receiving at least one empirical data point having empirical values for the input parameters and an empirical output value;
• defining a first mathematical function based on a difference between the received empirical output value and a new predicted output value;
• minimizing the first mathematical function to yield optimized output values;
• and
• generating a recipe for controlling the manufacturing apparatus for producing the wafers based on the optimized output values.