Units for collecting particles, apparatus including the same and methods for collecting particles using the same
AssigneeSamsung Electronics Co., Ltd.
InventorsKi-Su Kim, Jung-Hyeon Kim
Life of this patent
Estimating the term…
Abstract
A collection unit includes an exhaust conduit providing a path through which a process gas flows, a trap installed in the exhaust conduit, and a collection line connected to the trap. The trap has an inlet through which particles in the process are introduced into the trap, and the collection line penetrates a portion of the exhaust conduit to extend toward an outside region of the exhaust conduit. An apparatus including the collection unit and a method for collecting particles using the same are also provided.
Claims25
A substrate treatment apparatus, comprising:
- a process chamber in which a process is performed;
- an exhaust conduit connected to the process chamber to exhaust a process gas in the process chamber;
- and
- a collection unit installed at the exhaust conduit to collect particles in the process gas which flows through the exhaust conduit,
- wherein the collection unit comprises:
- a trap installed in the exhaust conduit, the trap having an inlet through which the particles are introduced and an outlet through which the particles are vented out;
- and
- a collection line connected to the outlet of the trap, the collection line penetrating a portion of the exhaust conduit to extend toward an outside region of the exhaust conduit.
A collection unit comprising:
- an exhaust conduit providing a path through which a process gas flows;
- a trap installed in the exhaust conduit, the trap having an inlet through which particles in the process gas are introduced into the trap;
- and
- a collection line connected to the trap,
- wherein the collection line penetrates a portion of the exhaust conduit to extend toward an outside region of the exhaust conduit.
A method for collecting particles in a process gas which flows through an exhaust conduit, the method comprising:
- installing a trap in the exhaust conduit, the trap having an inlet;
- and
- collecting the particles in the process gas into the trap through the inlet.
Dependencies are inferred from the claim text.