Disk-shaped substrate inner circumference polishing method
AssigneesShowa Denko K.K., Citizen Seimitsu Co., Ltd.
InventorsKazuyuki Haneda, Kunizo Watanabe, Yosuke Sato
Life of this patent
Estimating the term…
Abstract
The disk-shaped substrate inner circumference polishing method for polishing an inner circumference of a disk-shaped substrate including a portion having an opening hole at the center thereof includes inserting a brush having a shaft core into the portion having the opening hole of the disk-shaped substrate; fixing one end and the other end of the brush to a pair of rotating shafts that are provided at mutually detached positions and pulling at least any one of the one end and the other end of the brush and applying tension in the axial direction to the shaft core of the brush; and rotating the brush and polishing the inner circumference of the disk-shaped substrate.
Claims19
A disk-shaped substrate inner circumference polishing method for polishing an inner circumference of a disk-shaped substrate including a portion having an opening hole at the center thereof, comprising:
- inserting a brush having a shaft core into the portion having the opening hole of the disk-shaped substrate;
- fixing one end and the other end of the brush to a pair of rotating shafts that are provided at mutually detached positions and pulling at least any one of the one end and the other end of the brush and applying tension in an axial direction to the shaft core of the brush;
- and
- rotating the brush and polishing the inner circumference of the disk-shaped substrate.
A disk-shaped substrate inner circumference polishing method for polishing an inner circumference of a disk-shaped substrate having a portion having an opening hole at the center thereof, comprising:
- attaching a plurality of the disk-shaped substrates to a substrate holder that is provided with an attachment portion to which the plurality of the disk-shaped substrates are attached in an axial direction and a gear that is provided in an outer circumferential portion of the substrate holder;
- inserting a brush into the portions having the opening hole of the disk-shaped substrates attached to the substrate holder;
- engaging a drive side gear to the gear that is provided in the substrate holder;
- and
- rotating the substrate holder via the gear by a rotary driving of the drive side gear.
A disk-shaped substrate inner circumference polishing method for polishing an inner circumference of a disk-shaped substrate including a portion having an opening hole at the center thereof, comprising:
- attaching a plurality of the disk-shaped substrates to a substrate holder that is equipped with an attachment portion to which the plurality of the disk-shaped substrates are attached along an axial direction and a first gear and a second gear provided at positions that are mutually symmetrical to the axial direction of the substrate holder and provided in an outer circumferential portion of the substrate holder;
- inserting a brush into the portion having the opening hole of the disk shaped substrates attached to the substrate holder;
- engaging a drive side gear with the first gear provided on the substrate holder;
- rotating the drive side gear and polishing the portion having the opening hole;
- stopping the drive side gear, inverting both ends of the substrate holder in the axial direction and engaging the drive side gear with the second gear;
- and
- rotating the drive side gear and polishing the portion having the opening hole.
Dependencies are inferred from the claim text.